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Volumn 5, Issue 1, 2010, Pages 21-24
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Improvement of resolution in nano-fabrication of GaN by wet-chemical-assisted femtosencond laser ablation
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Author keywords
Ablation; Femtosecond laser; Gallium nitride; Nano fabrication
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Indexed keywords
2-D PHOTONIC CRYSTALS;
ACID SOLUTIONS;
BLUE LEDS;
FEMTOSECOND (FS) LASER;
FEMTOSECOND LASER;
FS-LASER;
GAN SUBSTRATE;
HCL SOLUTION;
LIGHT-EXTRACTION EFFICIENCY;
NANO SCALE;
NANO-FABRICATION;
NEAR INFRARED;
PERIODIC NANOSTRUCTURE;
SECOND HARMONICS;
WIDE-BAND-GAP SEMICONDUCTOR;
ABLATION;
DEBRIS;
EXTRACTION;
FABRICATION;
GALLIUM ALLOYS;
GALLIUM NITRIDE;
HARMONIC ANALYSIS;
HYDROCHLORIC ACID;
LASER ABLATION;
LASER APPLICATIONS;
LIGHT EMITTING DIODES;
PHOSPHORIC ACID;
PHOTONIC CRYSTALS;
SEMICONDUCTOR LASERS;
TWO DIMENSIONAL;
ULTRAFAST LASERS;
INFRARED LASERS;
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EID: 79956362678
PISSN: None
EISSN: 18800688
Source Type: Journal
DOI: 10.2961/jlmn.2010.01.0005 Document Type: Article |
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Times cited : (3)
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References (11)
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