Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks

Sensors and Actuators, A: Physical

Volumn 167, Issue 2, 2011, Pages 594-601

  Hasegawa, M ^a   Chutani, R K ^a   Gorecki, C ^a   Boudot, R ^a   Dziuban, P ^a   Giordano, V ^a   Clatot, S ^a   Mauri, L ^b  

^a FEMTO ST INSTITUTE   (France)

^b SAES GETTERS S P A   (Italy)

Author keywords

Alkali vapor cells; Anodic bonding; Buffer gas; MEMS atomic clock; Optical absorption spectroscopy

Indexed keywords

ACCELERATED AGING TEST; AGING TESTS; ALKALI-VAPOR CELLS; ANODIC BONDING; ANODIC BONDING PROCESS; ATOMIC FREQUENCY REFERENCES; BONDING QUALITY; BREAKDOWN VOLTAGE; BUFFER GAS; CESIUM VAPOR CELLS; ELECTRICAL BREAKDOWN; HIGH VOLTAGE; MICRO CELL; OPTICAL ABSORPTION SPECTROSCOPY; OPTICAL SPECTROSCOPY; PRESSURE CHANGE; VAPOR CELLS;

ABSORPTION SPECTROSCOPY; ATOMIC CLOCKS; ATOMIC SPECTROSCOPY; CELLS; CESIUM; ELECTRIC BREAKDOWN; GLASS BONDING; IONIZATION OF GASES; TESTING; VAPORS;

NEON;

EID: 79955923802     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.02.039     Document Type: Article

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