A novel serial high frequency surface acoustic wave humidity sensor

Sensors and Actuators, A: Physical

Volumn 167, Issue 2, 2011, Pages 231-236

  Lei, Sheng ^a   Deng, Chao ^b   Chen, Yuquan ^a   Li, Yang ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b ZHEJIANG UNIVERSITY   (China)

Author keywords

Humidity sensor; Interdigital electrode; Polyelectrolyte; Series; Surface acoustic wave

Indexed keywords

FILM COATINGS; HIGH HUMIDITY; HIGH OPERATING FREQUENCY; HIGH-FREQUENCY SURFACES; HUMIDITY SENSITIVE; INTERDIGITAL ELECTRODE; LOW HUMIDITY; NEW DESIGN; NOISE LEVELS; PROCESSING COSTS; SAW RESONATORS; SENSITIVE COMPONENTS; SERIES; SURFACE ACOUSTIC WAVE; SURFACE ACOUSTIC WAVES; TECHNICAL REQUIREMENT; TEMPERATURE COEFFICIENT;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; HUMIDITY SENSORS; INTEGRODIFFERENTIAL EQUATIONS; POLYELECTROLYTES; PROFITABILITY; SAWING;

ATMOSPHERIC HUMIDITY;

EID: 79955914186     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2011.01.020     Document Type: Article

References (9)

1. M. Penzaa, and V.I. Anisimkin Surface acoustic wave humidity sensor using polyvinyl-alcohol film Sensors and Actuators A: Physical 76 1999 162 166 (Pubitemid 30543250)
2. Yang Li, Peng Li, Mujie Yang, Sheng Lei, Yuquan Chen, and Xishan Guo A surface acoustic wave humidity sensor based on electrosprayed silicon-containing polyelectrolyte Sensors and Actuators B: Chemical 145 2010 516 520
3. A. Kawalec, and M. Pasternak A new high-frequency surface acoustic wave sensor for humidity measurement Instrumentation and Measurement 57 2008 2019 2023
4. Soumayajit Sarkara, Natalia Levita, and Gary Tepper Deposition of polymer coatings onto SAW resonators using AC electrospray Sensors and Actuators B: Chemical 114 2006 756 761
5. Cinzia Caliendo Acoustic method of investigating the material properties and humidity sensing behavior of polymer coated piezoelectric substrates Journal of Applied Physics 100 2006 054508
6. D.Z. Shen, W.H. Zhu, L.H. Nie, and S.Z. Yao Behaviour of a series piezoelectric sensor in electrolyte solution: part I theory Analytica Chimica Acta 276 1993 87 97 (Pubitemid 23094268)
7. Guohua, and Hui A novel temperature sensor based on gold interdigital electrodes and nano ZnO particles Applied Mechanics and Materials 20-23 2010 1495 1498
8. 3 humidity sensor Sensors and Actuators B: Chemical 46 1998 35 41 (Pubitemid 128406894)
9. 4 Sensors and Actuators A: Physics 61 1997 289 301