Dielectric elastomer stack actuators for integrated gas valves

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7976, Issue , 2011, Pages

  Flittner, Klaus ^a   Schlosser, Michael ^a   Schlaak, Helmut F ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Application; Dielectric elastomer actuator; Gas valve

Indexed keywords

ACTIVE REGIONS; CLOSING FORCE; DIELECTRIC ELASTOMER ACTUATORS; DIELECTRIC ELASTOMERS; ELECTROPLATING PROCESS; FINITE ELEMENT SIMULATIONS; GAS FLOWS; GAS VALVE; GAS VALVES; INTRINSIC LAYER; PLASMA BONDING; SACRIFICIAL SUBSTRATES; STACK ACTUATOR; TOP-DOWN PROCESS; VALVE SEATS;

CONDUCTING POLYMERS; ELASTOMERS; FABRICATION; FLOW RATE; PLASTICS; VALVES (MECHANICAL);

ACTUATORS;

EID: 79955887625     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.880050     Document Type: Conference Paper

References (6)

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