Prediction and compensation of motion accuracy in a linear motion bearing table

Precision Engineering

Volumn 35, Issue 3, 2011, Pages 393-399

  Khim, Gyungho ^a   Park, Chun Hong ^a   Shamoto, Eiji ^b   Kim, Seung Woo ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b NAGOYA UNIVERSITY   (Japan)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Corrective machining algorithm; Linear motion bearing table; Motion error analysis; Rail form error; Reverse analysis; Transfer function

Indexed keywords

ANGULAR MOTIONS; AVERAGING EFFECT; BEARING BLOCK; BEARING FORCES; CORRECTIVE MACHINING ALGORITHM; FORM ERRORS; HERTZ CONTACT THEORY; LINEAR MOTION; LINEAR MOTION BEARING TABLE; MOTION ACCURACY; MOTION ERRORS; NORMALIZED TRANSFER FUNCTIONS; PRELOADS; REVERSE ANALYSIS; SPATIAL FREQUENCY; THEORETICAL EVALUATION; X-Y TABLE;

ALGORITHMS; ERROR ANALYSIS; MACHINING; TRANSFER FUNCTIONS;

BEARINGS (STRUCTURAL);

EID: 79955830290     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2010.12.006     Document Type: Article

References (7)

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