Fabrication of PZT by sol-gel method

Proceedings of the 2010 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA10

Volumn , Issue , 2010, Pages 310-314

  Chen, Bing Huei ^a   Wu, Long ^b   Chure, Ming Cheng ^b   Chen, Yeong Chin ^c  

^a NAN JEON INSTITUTE OF TECHNOLOGY   (Taiwan)

^b FAR EAST UNIVERSITY   (Taiwan)

^c ASIA UNIVERSITY   (Taiwan)

Author keywords

Lead zirconate titanate; piezoelectric thin film; sol gel method; spin coating method

Indexed keywords

BULK CERAMICS; COERCIVE FIELD; CRACKING PROBLEM; GEL CONCENTRATION; GEL SOLUTIONS; HEATING CONDITIONS; HIGH PURITY; LEAD ZIRCONATE TITANATE; OPTIMUM FABRICATION; PB(ZR , TI)O; PIEZOELECTRIC CERAMIC POWDERS; PIEZOELECTRIC THIN FILM; POLYCRYSTALLINE; PZT; PZT THIN FILM; REMANENT POLARIZATION; SINTERING CONDITION; SOL-GEL METHOD; SOL-GEL METHODS; SPIN COATING METHOD;

ACOUSTIC WAVES; ACOUSTICS; AMORPHOUS FILMS; AMORPHOUS MATERIALS; CALCINATION; CERAMIC MATERIALS; COATINGS; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; HEATING; LEAD; PEROVSKITE; PIEZOELECTRIC CERAMICS; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; POWDERS; SEMICONDUCTING LEAD COMPOUNDS; SINTERING; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; ZIRCONIUM;

GELS;

EID: 79955775716     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SPAWDA.2010.5744326     Document Type: Conference Paper

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