Sensing of CO2 at room temperature using work function readout of (hetero-)polysiloxanes sensing layers

Sensors and Actuators, B: Chemical

Volumn 154, Issue 2, 2011, Pages 206-212

  Stegmeier, S ^a   Fleischer, M ^a   Tawil, A ^a   Hauptmann, P ^b   Endres, H E ^c  

^a SIEMENS AG   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

^c Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

CO2 detection; FGFET; Kelvin probe; Polysiloxanes; Room temperature; Work function change

Indexed keywords

CO2 DETECTION; FGFET; KELVIN PROBE; POLYSILOXANES; ROOM TEMPERATURE; WORK FUNCTION CHANGE;

PROBES; SIGNAL DETECTION; SILICATES; SILICONES; WORK FUNCTION;

FIELD EFFECT TRANSISTORS;

EID: 79955663430     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.12.071     Document Type: Conference Paper

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