Surface acoustic wave sensors of delay lines based on MEMS

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 11, 2010, Pages 7258-7261

  Haofeng, Li ^a   Rui, Jia ^a   Weilong, Li ^a   Chen, Chen ^a   Xinyu, Liu ^a  

^a INSTITUTE OF MICROELECTRONICS   (China)

Author keywords

MATLAB; MEMS; SAW delay lines; Sensor; SPUDT

Indexed keywords

CENTER FREQUENCY; COUPLING OF MODES THEORIES; DELAY LINE; HIGH FREQUENCY; HIGH QUALITY FACTORS; HIGH-FREQUENCY SURFACES; KEYPOINTS; LOW LOSS; MASK LAYOUT; MEMS TECHNOLOGY; MIXED MATRIX; P-MATRICES; SA WFILTER; SAW DELAY LINE; SAW DELAY LINES; SAW SENSORS; SINGLE-PHASE UNIDIRECTIONAL TRANSDUCERS; SPUDT; SURFACE ACOUSTIC WAVE SENSORS; THEORETICAL SIMULATION; WAVE CONTROL;

ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; BANDPASS FILTERS; ELECTRIC DELAY LINES; SENSORS; TRANSDUCERS; WAVES;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 79955549700     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2817     Document Type: Conference Paper

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