Preparation and humidity sensitivity of multi-layered zirconia thin films by sol-gel method

Sensor Letters

Volumn 9, Issue 2, 2011, Pages 670-674

  Su, Meiying ^a   Wang, Jing ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Humidity sensor; Multi layered; Sol gel; Zirconia thin film

Indexed keywords

ANNEALING TEMPERATURES; ATOMIC FORCE MICROSCOPES; COMPLEX IMPEDANCE; FOUR-ORDER; FOURIER; HUMIDITY SENSING; HUMIDITY SENSING MECHANISM; HUMIDITY SENSITIVITY; MULTI-LAYERED; RELATIVE HUMIDITIES; RESPONSE TIME; SI SUBSTRATES; SOL-GEL METHODS; TIO;

ATMOSPHERIC HUMIDITY; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; GELS; HUMIDITY SENSORS; SOL-GEL PROCESS; SOL-GELS; SOLS; THIN FILMS; X RAY DIFFRACTION; ZIRCONIA; ZIRCONIUM ALLOYS;

FILM PREPARATION;

EID: 79955535624     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2011.1588     Document Type: Conference Paper

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