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Volumn 357, Issue 10, 2011, Pages 2187-2191
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The effects of annealing temperature on photoluminescence of silicon nanoparticles embedded in SiNx matrix
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Author keywords
Photoluminescence; Quantum confinement effect; Silicon nanoparticles; SiNx matrix
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Indexed keywords
ANNEALING TEMPERATURES;
BONDING CONFIGURATIONS;
CHEMICAL COMPOSITIONS;
FOURIER TRANSFORM INFRARED ABSORPTION SPECTROSCOPY;
MATRIX;
NANO-SIZE;
PL SPECTROSCOPY;
QUANTUM CONFINEMENT EFFECT;
QUANTUM CONFINEMENT EFFECTS;
RADIATIVE DEFECTS;
SILICON NANOPARTICLES;
SILICON NITRIDE FILM;
SILICON SEMICONDUCTOR MATERIALS;
ANNEALING;
DEPOSITION;
FOURIER TRANSFORMS;
NANOPARTICLES;
OPTICAL PROPERTIES;
PHOTOLUMINESCENCE;
PLASMA DEPOSITION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
QUANTUM CONFINEMENT;
SEMICONDUCTING SILICON;
SEMICONDUCTING SILICON COMPOUNDS;
SILICON NITRIDE;
ABSORPTION SPECTROSCOPY;
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EID: 79955479318
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2011.02.055 Document Type: Article |
Times cited : (21)
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References (22)
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