An investigation into graphene exfoliation and potential graphene application in MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7928, Issue , 2011, Pages

  Fercana, George ^a,c   Kletetschka, Gunther ^b,c,d   Mikula, Vilem ^b,c   Li, Mary ^c  

^a Clemson University   (United States)

^b CATHOLIC UNIVERSITY OF AMERICA   (United States)

^c NASA GODDARD SPACE FLIGHT CENTER   (United States)

^d INSTITUTE OF MATHEMATICS   (Czech Republic)

Author keywords

graphene based; MEMS; transparent electrode

Indexed keywords

ADHESIVE MATERIALS; CHEMICAL CROSS-LINKING; COVALENT BINDING; GRAPHENE SHEETS; HIGHLY ORDERED PYROLYTIC GRAPHITES; HONEYCOMB LATTICES; INDIUM TIN OXIDE; MECHANICAL EXFOLIATION; MECHANICAL STRENGTH; MEMS APPLICATIONS; MEMS-STRUCTURE; MEMSDEVICES; MICRO OPTO ELECTRO MECHANICAL SYSTEMS; MICRO-SHUTTER; NITRENES; OPTICAL TRANSPARENCY; PERFLUOROPHENYL NITRENES; SILICON OXIDE SUBSTRATES; TOWARD INTEGRATION; TRANSPARENT ELECTRODE;

ADDITION REACTIONS; CHIP SCALE PACKAGES; CROSSLINKING; ELECTRIC PROPERTIES; ELECTROMECHANICAL DEVICES; ELECTRON MOBILITY; ENERGY EFFICIENCY; HONEYCOMB STRUCTURES; MECHANICAL PROPERTIES; MOEMS; MONOLAYERS; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; POLYIMIDES; PYROLYSIS; SILICON COMPOUNDS; SILICON OXIDES; TIN; TIN OXIDES;

GRAPHENE;

EID: 79953905117     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.878965     Document Type: Conference Paper

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