Development of a system for laser-assisted molding of micro- and nanostructures

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 27, Issue 3, 2009, Pages 1323-1326

  Michaeli, Walter ^a   Klaiber, Fritz ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LASER HEATING; MOLDS; NANOSTRUCTURES; RELIABILITY ANALYSIS;

CAVITY SURFACES; DEMOLDING; FUNCTIONAL SURFACES; HIGH GROWTH; HIGH TEMPERATURE GRADIENT; INJECTION MOLDS; KEY TECHNOLOGIES; LASER CONTROL; LASER POWER; LASER-ASSISTED; MEDICAL INDUSTRIES; MICRO AND NANOSTRUCTURES; MOLD SURFACES; NANOSTRUCTURED PARTS; TEMPERATURE CHANGES; TEMPERATURE OVERSHOOT; TEMPERATURE PROFILES; WHOLE PROCESS;

INJECTION MOLDING;

EID: 79953880337     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3079764     Document Type: Conference Paper

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