Fabrication and testing of a large area, high density, parylene MEMS μECoG array

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1031-1034

  Ledochowitsch, P ^a   Felus R J ^b   Gibboni, R R ^a   Miyakawa, A ^a   Bao, S ^a   Maharbiz, M M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Grenoble INP Phelma   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC CONDUCTIVE FILMS; AUDITORY CORTEX; CEREBRO SPINAL FLUIDS; ELECTROCORTICOGRAPHY; ELECTRODE ARRAYS; ELECTRODE PITCHES; EVOKED POTENTIALS; FAN-OUT; HIGH DENSITY; IN-VIVO; MEMSDEVICES; MONOLITHICALLY INTEGRATED; PARYLENE CABLE; PARYLENES; THREE-LAYER; TWO LAYERS;

ACOUSTIC IMPEDANCE; ACOUSTIC SPECTROSCOPY; CONDUCTIVE FILMS; ELECTROCHEMICAL CORROSION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTROPHYSIOLOGY; MECHANICAL ENGINEERING; MECHANICS; MONOLITHIC INTEGRATED CIRCUITS; PLATINUM; REACTIVE ION ETCHING;

MEMS;

EID: 79953795740     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734604     Document Type: Conference Paper

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