Recent achievements in SopSiC substrates for high power and high frequency applications

2006 International Conference on Compound Semiconductor Manufacturing Technology

Volumn , Issue , 2006, Pages 71-72

  Langer, R ^a   Faure, B ^b   Boussagol, A ^b   Bove, P ^a   Lahreche, H ^a   Wilk, A ^a   Thuret, J ^a   Letertre, F ^b  

^a Picogiga International   (France)

^b PARC TECHNOLOGIQUE DES FONTAINES   (France)

Author keywords

AlGaN GaN; SiC; SopSiC; Wafer bonding

Indexed keywords

ALGAN/GAN; ENGINEERED-SUBSTRATE; HIGH-FREQUENCY APPLICATIONS; INNOVATIVE APPROACHES; POLY-CRYSTALLINE SILICON; SIC; SIC SINGLE CRYSTALS; SOPSIC;

CHEMICAL INDUSTRY; GALLIUM NITRIDE; MICROELECTRONICS; MILITARY APPLICATIONS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON; SILICON CARBIDE; WAFER BONDING;

SUBSTRATES;

EID: 79953784904     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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