Micro bead type temperature sensor with ratiometric fluorescence dyes encapsulated by Parylene

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 928-931

  Aoki, H ^a   Kan, T ^a   Binh Khiem, N ^a   Matsumoto, K ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONVENTIONAL METHODS; DYE CONCENTRATION; FLUORESCENCE INTENSITY MEASUREMENT; MEASURING TEMPERATURE; MICROBEADS; MICROREGIONS; PARYLENES; RATIOMETRIC FLUORESCENCE; TARGET OBJECT;

FLUORESCENCE; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING;

SENSORS;

EID: 79953781249     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734578     Document Type: Conference Paper

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