MEMS scanning laser projection based on high-Q vacuum packaged 2D-resonators

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7930, Issue , 2011, Pages

  Hofmann, U ^a   Eisermann, C ^a   Quenzer, H J ^a   Janes, J ^a   Schroeder, C ^a   Schwarzelbach, O ^a   Jensen, B ^a   Ratzmann, L ^a   Giese, T ^a   Senger, F ^a   Hagge, J ^a   Weiss, M ^a   Wagner, B ^a   Benecke, W ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

laser projection; MEMS; phase control; scanning mirror; vacuum encapsulation; wafer level packaging

Indexed keywords

APERTURE SIZES; ATTRACTIVE SOLUTIONS; CAPACITIVE FEEDBACK; CLOSED LOOPS; COMPACT LASERS; CONTROL ELECTRONICS; EMBEDDED CELLS; FABRICATION PROCESS; FRAUNHOFER; GAS DAMPING; HIGH SCAN FREQUENCY; IMAGE PROJECTION; LARGE SCAN ANGLE; LASER INTENSITIES; LASER PROJECTION; LASER SOURCES; LOW-POWER CONSUMPTION; MEMS MIRRORS; MEMS SCANNER; MEMS SCANNING MIRROR; MICRO MIRROR; POWER CONSUMPTION; PROJECTION DISPLAYS; QUALITY FACTORS; SCANNING LASERS; SCANNING MIRROR; SMALL SIZE; TWO-AXIS; VIDEO PROJECTIONS; WAFER LEVEL; WAFER LEVEL PACKAGING;

ELECTRONICS PACKAGING; IMAGE RESOLUTION; MOEMS; OPTICAL PROJECTORS; PHASE CONTROL; SCANNING; VACUUM;

MIRRORS;

EID: 79953654363     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.878676     Document Type: Conference Paper

References (6)

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