Fabrication of planar, layered nanoparticles using tri-layer resist templates

Nanotechnology

Volumn 22, Issue 18, 2011, Pages

  Hu, Wei ^a   Zhang, Mingliang ^a   Wilson, Robert J ^a   Koh, Ai Leen ^a,b   Wi, Jung Sub ^a   Tang, Mary ^b   Sinclair, Robert ^a   Wang, Shan X ^a  

^a Stanford University   (United States)

^b STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL ENVIRONMENTS; BIOMEDICAL APPLICATIONS; CATALYTIC PROPERTIES; FABRICATION METHOD; LAYERED ARCHITECTURE; MAGNETIC NANOPARTICLES; MULTI-MODAL; RELEASE LAYER; RELEASE PROCESS; SYNTHETIC NANOPARTICLES; TRI-LAYER RESISTS; VAPOR PHASE DEPOSITION;

FABRICATION; MAGNETIC MULTILAYERS; NANOPARTICLES;

NANOMAGNETICS;

NANOPARTICLE;

ARTICLE; CATALYSIS; CHEMISTRY; ECONOMICS; MAGNETISM; METHODOLOGY; NANOTECHNOLOGY; SURFACE PROPERTY; ULTRASTRUCTURE;

CATALYSIS; MAGNETICS; NANOPARTICLES; NANOTECHNOLOGY; SURFACE PROPERTIES;

EID: 79953284060     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/18/185302     Document Type: Article

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