Contaminant particles removal by negative air ionic cleaner in industrial minienvironment for IC manufacturing processes

Building and Environment

Volumn 46, Issue 8, 2011, Pages 1537-1544

  Shiue, Angus ^a   Hu, Shih Cheng ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Air cleaning factor; Air mixing; Negative air ion; Particle; Relative effectiveness; Removal efficiency

Indexed keywords

AIR CLEANING; AIR MIXING; NEGATIVE AIR ION; PARTICLE; RELATIVE EFFECTIVENESS; REMOVAL EFFICIENCY;

AIR FILTERS; INTEGRATED CIRCUITS; IONS; MIXING; REMOVAL;

CLEANING;

AIRFLOW; EFFICIENCY MEASUREMENT; INDOOR AIR; IONIC COMPOSITION; IONIZATION; MIXING RATIO; OPERATIONS TECHNOLOGY; PARTICLE MOTION;

EID: 79953219369     PISSN: 03601323     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.buildenv.2011.01.006     Document Type: Article

References (21)

1. Minienvironments 2002, IEST-RP-CC028.1, Institute of Environmental Sciences and Technology, Rolling Meadows, IL.
2. Cleanrooms and associated controlled environments-Part 7: separative devices (clean air hoods, gloveboxes, isolators, minienvironments) 2004, ISO Standard 14644-7, International Organization for Standardization (ISO).
3. Daniels S.L. On the ionization of air for removal of noxious effluvia. IEEE Transactions on Plasma Science 2002, 30:1471-1481.
4. Grabarczyk Z. Effectiveness of indoor air cleaning with corona ionizers. Journal of Electrostatics 2001, 51-52:278-283.
5. Wu C.C., Lee G.W.M. The temporal aerosol size distribution in indoor environment with negative electric discharge. Journal of Aerosol Science 2003, 34:S999-S1000.
6. Niu J.L., Tung T.C.W., Burnett J. Quantification of dust removal and ozone emission of ionizer air-cleaners by chamber testing. Journal of Electrostatics 2001, 51-52:20-24.
7. Grinshpun S.A., Mainelis G., Reponen T., Willeke K., Trunov M.A., Adhikari A. Effect of wearable ionizers on the concentration of Respirable airborne particles and microorganisms. Journal of Aerosol Science 2001, 32:S335-S336.
8. Grinshpun S.A., Adhikari A., Lee B.U., Trunov M., Mainelis G., Yermakov M., et al. Indoor air Pollution control through ionization. Air Pollution: Modeling, monitoring and Management of air Pollution 2004, 689-704, WIT Press, Southampton, U.K.
9. Wu C.C., Lee G.W.M., Cheng P., Yang S., Yu K.P. Effect of wall surface materials on deposition of particles with the aid of negative air ions. Journal of Aerosol Science 2006, 37(5):616-630.
10. Grinshpun S.A., Mainelis G., Trunov M., Adhikari A., Reponen T., Willeke K. Evaluation of ionic air purifiers for reducing an aerosol exposure in confined indoor spaces. Indoor Air 2005, 15:235-245.
11. Lee B.U., Yermakov M., Grishpun S.A. Removal of Fine and ultrafine particles from indoor air environments by the unipolar ion emission. Atmospheric Environment 2004, 38:4815-4823.
12. Nion Technology and Products Report.
13. Association of Home Appliance Manufacturers. Method of Measuring Performance of Portable Household Electric Cord-connected Room Air Cleaners, AHAM AC-1-2001.
14. Ward M., Siegel J.A., Corsi R.L. The effectiveness of stand alone air cleaners for shelter-in-place. Indoor Air 2005, 15:127-134.
15. Huang R., Agranovski I., Pyankov O., Grinshpun S. Removal of viable bioaerosol particles with a low-efficiency HVAC filter enhanced by continuous emission of unipolar air ions. Indoor Air 2008, 18(2):106-112.
16. Agranovski I., Agranovski V., Grinshpun S., Reponen T., Willeke K. Development and evaluation of a new personal sampler for viable airborne microorganisms. Atmospheric Environment 2002, 36:889-898.
17. Berry D., Mainelis G., Fennell D. Effect of an ionic air cleaner on Indoor/Outdoor particle ratios in a Residential environment. Aerosol Science and Technology 2007, 41(3):315-328.
18. Cyrys J., Pitz M., Bischof W., Wichmann HE., Heinrich J. Relationship between Indoor and Outdoor Levels of Fine Particle Mass, Particle Number Concentrations and Black Smoke under different Ventilation Conditions. Journal of Exposure Analysis and Environmental Epidemiology 2004, 14:275-283.
19. Wallace L.A., Emmerich S.J., Howard-Reed C. Continuous measurements of air change rates in an Occupied House for 1 year: the effect of temperature, wind, fans, and Windows. Journal of Exposure Analysis and Environmental Epidemiology 2002, 12:296-306.
20. Kondrashova M.N., Grigorenko E.V., Tikhonov A.N., Sirota T.V., Temnov A.V., Stavrovskaja I.G. The primary physico-chemical mechanism for the beneficial biological/medical effects of negative air ions. IEEE Transactions on Plasma Science 2000, 28:230-237.
21. Wu C.C., Lee G.W.M., Yang S., Yu K.P., Lou C.L. Influence of air humidity and the distance from the source on negative air ion concentration in indoor air. Science of the Total Environment 2006, 370(1):245-253.