Breakdown current density of CVD-grown multilayer graphene interconnects

IEEE Electron Device Letters

Volumn 32, Issue 4, 2011, Pages 557-559

  Lee, Kyeong Jae ^a   Chandrakasan, Anantha P ^a   Kong, Jing ^a  

^a USA   (United States)

Author keywords

Current density; graphene; interconnect

Indexed keywords

AVERAGE SURFACE ROUGHNESS; BREAKDOWN CURRENTS; BREAKDOWN MECHANISM; GRAPHENE LAYERS; GRAPHENE SHEETS; INTERCONNECT; METHANE CONCENTRATIONS; RESISTIVE HEATING; STRONG CORRELATION;

CHEMICAL VAPOR DEPOSITION; CURRENT DENSITY; ELECTRIC RESISTANCE; METHANATION; METHANE; MULTILAYERS; SHEET RESISTANCE; SURFACE ROUGHNESS;

GRAPHENE;

EID: 79953066018     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2108259     Document Type: Article

References (21)

1. X. Du, I. Skachko, A. Barker, and E. Y. Andrei, "Approaching ballistic transport in suspended graphene," Nat. Nanotechnol., vol. 3, no. 8, pp. 491-495, Jul. 2008.
2. A. Balandin, S. Ghosh, W. Bao, I. Calizo, D. Teweldebrhan, F. Miao, and C. Lau, "Superior thermal conductivity of single-layer graphene," Nano Lett., vol. 8, no. 3, pp. 902-907, Mar. 2008.
3. R. Murali, Y. Yang, K. Brenner, T. Beck, and J. D. Meindl, "Breakdown current density of graphene nanoribbons," Appl. Phys. Lett., vol. 94, no. 24, pp. 243 114-1-243 114-3, Jun. 2009.
4. T. Yu, E.-K. Lee, B. Briggs, B. Nagabhirava, and B. Yu, "Bilayer graphene system: Current-induced reliability limit," IEEE Electron Device Lett., vol. 31, no. 10, pp. 1155-1157, Oct. 2010.
5. A. Reina, X. Jia, J. Ho, D. Nezich, H. Son, V. Bulovic, M. S. Dresselhaus, and J. Kong, "Large area, few-layer graphene films on arbitrary substrates by chemical vapor deposition," Nano Lett., vol. 9, no. 1, pp. 30-35, Jan. 2009.
6. K. S. Kim, Y. Zhao, H. Jang, S. Y. Lee, J. M. Kim, K. S. Kim, J.-H. Ahn, P. Kim, J.-Y. Choi, and B. H. Hong, "Large-scale pattern growth of graphene films for stretchable transparent electrodes," Nature, vol. 457, no. 7230, pp. 706-710, Feb. 2009.
7. Y. Lee, S. Bae, H. Jang, S. Jang, S.-E. Zhu, S. H. Sim, Y. I. Song, B. H. Hong, and J.-H. Ahn, "Wafer-scale synthesis and transfer of graphene films," Nano Lett., vol. 10, no. 2, pp. 490-493, Feb. 2010.
8. S. Bae, H. Kim, Y. Lee, X. Xu, J. Park, Y. Zheng, J. Balakrishnan, T. Lei, H. Kim, Y. Song, Y.-J. Kim, K. Kim, B. Ozyilmax, J.-H. Ahn, H. Byung, and S. Iijima, "Roll-to-roll production of 30-inch graphene films for transparent electrodes," Nat. Nanotechnol., vol. 5, no. 8, pp. 574-578, Aug. 2010.
9. X. Chen, K.-J. Lee, D. Akinwande, G. F. Close, S. Yasuda, B. Paul, S. Fujita, J. Kong, and H.-S. P. Wong, "High-speed graphene interconnects monolithically integrated with CMOS ring oscillators operating at 1.3 GHz," in IEDM Tech. Dig., 2009, pp. 1-4.
10. X. Li, W. Cai, J. An, S. Kim, J. Nah, D. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S. K. Banerjee, L. Colombo, and R. S. Ruoff, "Large-area synthesis of high-quality and uniform graphene films on copper foils," Science, vol. 324, no. 5932, pp. 1312-1314, Jun. 2009.
11. C. Xu, H. Li, and K. Banerjee, "Graphene nano-ribbon (GNR) interconnects: A genuine contender or a delusive dream?," in IEDM Tech. Dig., Dec. 2008, pp. 1-4.
12. A. Reina, S. Thiele, X. Jia, S. Bhaviripudi, M. Dresselhaus, J. Schaefer, and J. Kong, "Growth of large-area single-and bi-layer graphene by controlled carbon precipitation on polycrystalline Ni surfaces," Nano Res., vol. 2, no. 6, pp. 509-516, Jun. 2009.
13. R. Murali, K. Brenner, Y. Yang, T. Beck, and J. Meindl, "Resistivity of graphene nanoribbon interconnects," IEEE Electron Device Lett., vol. 30, no. 6, pp. 611-613, Jun. 2009.
14. J. Krupka and W. Strupinski, "Measurements of the sheet resistance and conductivity of thin epitaxial graphene and SiC films," Appl. Phys. Lett., vol. 96, no. 8, pp. 082 101-1-082 101-3, Feb. 2010.
15. M. Suzuki, Y. Ominami, Q. Ngo, C. Y. Yang, A. M. Cassell, and J. Li, "Current-induced breakdown of carbon nanofibers," J. Appl. Phys., vol. 101, no. 11, pp. 114 307-1-114 307-3, Jun. 2007.
16. J. Y. Huang, S. Chen, S. H. Jo, Z. Wang, D. X. Han, G. Chen, M. S. Dresselhaus, and Z. F. Ren, "Atomic-scale imaging of wall-by-wall breakdown and concurrent transport measurements in multiwall carbon nanotubes," Phys. Rev. Lett., vol. 94, no. 23, pp. 236 802-1-236 802-4, Jun. 2005.
17. H. Kitsuki, T. Yamada, D. Fabris, J. R. Jameson, P. Wilhite, M. Suzuki, and C. Y. Yang, "Length dependence of current-induced breakdown in carbon nanofiber interconnects," Appl. Phys. Lett., vol. 92, no. 17, pp. 173 110-1-173 110-3, Apr. 2008.
18. P.-C. Wang and R. G. Filippi, "Electromigration threshold in copper interconnects," Appl. Phys. Lett., vol. 78, no. 23, pp. 3598-3600, Jun. 2001. (Pubitemid 33599253)
19. N. Liu, L. Fu, B. Dai, K. Yan, X. Liu, R. Zhao, Y. Zhang, and Z. Liu, "Universal segregation growth approach to wafer-size graphene from non-noble metals," Nano Lett., vol. 11, no. 1, pp. 297-303, Jan. 2011.
20. Z. Liu, A. A. Bol, and W. Haensch, "Large-scale graphene transistors with enhanced performance and reliability based on interface engineering by phenylsilane self-assembled monolayers," Nano Lett., to be published.
21. S. Lee, K. Lee, and Z. Zhong, "Wafer scale homogeneous bilayer graphene films by chemical vapor deposition," Nano Lett., vol. 10, no. 11, pp. 4702-4707, Nov. 2010.