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Volumn 219, Issue 1, 2011, Pages 50-57

Novel polymeric nonionic photoacid generators and corresponding polymer Langmuir-Blodgett (LB) films for photopatterning

Author keywords

Langmuir Blodgett films; Photoacid generator; Photodegradation; Photolithography; Polymer resist

Indexed keywords


EID: 79952993673     PISSN: 10106030     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jphotochem.2011.01.015     Document Type: Article
Times cited : (17)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.