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Volumn 98, Issue 11, 2011, Pages

Low resistance Ti/Au contacts to amorphous gallium indium zinc oxides

Author keywords

[No Author keywords available]

Indexed keywords

COMBINED EFFECT; ELECTRON CONCENTRATION; ELEVATED TEMPERATURE; GALLIUM INDIUM ZINC OXIDES; INTERFACIAL REACTIONS; LOW RESISTANCE; SPECIFIC CONTACT RESISTANCES; TRANSMISSION LINE METHODS;

EID: 79952941413     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3567796     Document Type: Article
Times cited : (31)

References (15)
  • 1
    • 9744248669 scopus 로고    scopus 로고
    • Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors
    • DOI 10.1038/nature03090
    • K. Nomura, H. Ohta, A. Takagi, T. Kamiya, M. Hirano, and H. Hosono, Nature (London) 0028-0836 432, 488 (2004). 10.1038/nature03090 (Pubitemid 39585210)
    • (2004) Nature , vol.432 , Issue.7016 , pp. 488-492
    • Nomura, K.1    Ohta, H.2    Takagi, A.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 4
    • 44249094185 scopus 로고    scopus 로고
    • Specific contact resistances between amorphous oxide semiconductor In-Ga-Zn-O and metallic electrodes
    • DOI 10.1016/j.tsf.2007.10.051, PII S0040609007017270
    • Y. Shimura, K. Nomura, H. Yanagi, T. Kamiya, M. Hirano, and H. Hosono, Thin Solid Films 0040-6090 516, 5899 (2008). 10.1016/j.tsf.2007.10.051 (Pubitemid 351726028)
    • (2008) Thin Solid Films , vol.516 , Issue.17 , pp. 5899-5902
    • Shimura, Y.1    Nomura, K.2    Yanagi, H.3    Kamiya, T.4    Hirano, M.5    Hosono, H.6
  • 7
    • 79952949325 scopus 로고    scopus 로고
    • The etching rate of a-GIZO film using BOE was 100 nm/min
    • The etching rate of a-GIZO film using BOE was 100 nm/min.
  • 15
    • 33846011101 scopus 로고    scopus 로고
    • Hydrogen multicentre bonds
    • DOI 10.1038/nmat1795, PII NMAT1795
    • A. Janotti and C. G. Van de Walle, Nature Mater. 1476-1122 6, 44 (2007). 10.1038/nmat1795 (Pubitemid 46041475)
    • (2007) Nature Materials , vol.6 , Issue.1 , pp. 44-47
    • Janotti, A.1    Van De Walle, C.G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.