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Volumn 44, Issue 12, 2010, Pages
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High-precision wafer-level optics fabrication and integration
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Author keywords
[No Author keywords available]
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Indexed keywords
AUTO-ALIGNMENT;
HIGH-PRECISION;
INK-JET;
MATERIALS EVALUATION;
MICRO-OPTICAL COMPONENTS;
MICROSTRUCTURE TECHNOLOGY;
MODULE MANUFACTURING;
OPTICS FABRICATION;
PREPOLYMERS;
PROCESS OPTIMIZATION;
PROCESS PARAMETERS;
STEP-AND-REPEAT;
ULTRAVIOLET-IMPRINT LITHOGRAPHY;
UV IMPRINT;
UV MOLDING;
WAFER LEVEL;
WAFER-LEVEL FABRICATION;
WORKING STAMPS;
INK;
LENSES;
MICROOPTICS;
MICROSTRUCTURE;
MOLDING;
MONOMERS;
OPTIMIZATION;
PATTERN RECOGNITION;
NANOIMPRINT LITHOGRAPHY;
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EID: 79952915985
PISSN: 07311230
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (5)
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References (0)
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