Functionalized back-end devices for (Bi)CMOS circuits

ECS Transactions

Volumn 33, Issue 6, 2010, Pages 823-829

  Wenger, Ch ^a   Walczyk, Ch ^a   Walczyk, D ^a   Lukosius, M ^a   Fraschke, M ^a   Wolanskya, D ^a   Santosb, P V ^b  

^a IHP   (Germany)

^b PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; GERMANIUM COMPOUNDS; MICROELECTRONICS; SI-GE ALLOYS; TIMING CIRCUITS;

BACK END OF LINES; CMOS CIRCUITS; END-DEVICES; FUNCTIONALIZED; MICROELECTRONICS SYSTEMS; MORE THAN MOORE; NON-VOLATILE MEMORY; SURFACE ACOUSTIC WAVES;

BICMOS TECHNOLOGY;

EID: 79952661805     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3487612     Document Type: Conference Paper

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