Rotatable broadband retarders for far-infrared spectroscopic ellipsometry

Thin Solid Films

Volumn 519, Issue 9, 2011, Pages 2698-2702

  Kang, T D ^a   Standard, E ^a   Carr, G L ^b   Zhou, T ^a   Kotelyanskii, M ^a,c   Sirenko, A A ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c RUDOLPH TECHNOLOGIES INC   (United States)

Author keywords

Double Fresnel rhomb; Far infrared retarder; Rotatable retarder; Spectroscopic ellipsometry; TOPAS; Total internal reflection

Indexed keywords

FAR-INFRARED RETARDER; FRESNEL RHOMB; ROTATABLE RETARDER; TOPAS; TOTAL INTERNAL REFLECTIONS;

REFRACTIVE INDEX;

SPECTROSCOPIC ELLIPSOMETRY;

EID: 79952620139     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2010.12.057     Document Type: Article

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