Surface modification of highly oriented pyrolytic graphite by reaction with atomic nitrogen at high temperatures

Applied Surface Science

Volumn 257, Issue 13, 2011, Pages 5647-5656

  Zhang, Luning ^a,c   Pejaković, Dušan A ^a   Geng, Baisong ^b,d   Marschall, Jochen ^a  

^a SRI INTERNATIONAL   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Siemens Technology To Business Center   (China)

^d LANZHOU UNIVERSITY   (China)

Author keywords

Anisotropic etching; Dry etching; Graphene; Hexagonal pits; HOPG; N atoms; Nitridation

Indexed keywords

ALUMINUM NITRIDE; ANISOTROPIC ETCHING; ATOMS; GRAIN BOUNDARIES; GRAPHENE; GRAPHITE; NITRIDATION; NITROGEN; SIZE DISTRIBUTION; SURFACE DEFECTS;

HEXAGONAL PITS; HIGH TEMPERATURE; HIGHLY ORIENTED PYROLYTIC GRAPHITE; HOPG; NITRIDATION BY NITROGEN; REACTION TEMPERATURE; SURFACE NUMBER DENSITY; WIDE SIZE DISTRIBUTION;

DRY ETCHING;

EID: 79952538488     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.01.066     Document Type: Article

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