Mechanical characterization of aluminium nanofilms

Microelectronic Engineering

Volumn 88, Issue 5, 2011, Pages 844-847

  Guisbiers, G ^a,b   Herth, E ^a   Buchaillot, L ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

Aluminium; Hall Petch; Mechanics; Nanofilm; Nanoindentation

Indexed keywords

ALUMINIUM; BULK VALUE; EXPERIMENTAL INVESTIGATIONS; HALL-PETCH; HIGH MELTING POINT; LOW-MELTING POINT MATERIALS; MECHANICAL CHARACTERIZATIONS; NANO FILMS; RESISTANCE INCREASE; SEM; SILICON SUBSTRATES; SIZE EFFECTS; TEM; YOUNG'S MODULUS;

ALUMINUM; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELASTICITY; HARDNESS; MECHANICAL PROPERTIES; MELTING POINT; NANOINDENTATION; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

WEAR RESISTANCE;

EID: 79952489721     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.06.028     Document Type: Conference Paper

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