Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures

Applied Surface Science

Volumn 257, Issue 12, 2011, Pages 5420-5423

  Bonse, J ^a   Rosenfeld, A ^b   Kruger J ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

^b MAX BORN INSTITUT   (Germany)

Author keywords

Femtosecond laser ablation; Laser induced periodic surface structures (LIPSS); Optical properties; Semiconductors; Silicon; Surface plasmon polaritons

Indexed keywords

ELECTROMAGNETIC WAVE POLARIZATION; ELECTRONS; EXCITED STATES; FEMTOSECOND LASERS; FUSED SILICA; IRRADIATION; LASER ABLATION; LASER PULSES; OPTICAL PROPERTIES; PERIODIC STRUCTURES; PHONONS; PHOTONS; SAPPHIRE; SEMICONDUCTOR LASERS; SEMICONDUCTOR MATERIALS; SILICON; SILICON WAFERS; SURFACE PLASMON RESONANCE; SURFACE PLASMONS; SURFACE STRUCTURE;

FEMTOSECOND LASER PULSE IRRADIATION; LASER-INDUCED PERIODIC SURFACE STRUCTURES; LOW-SPATIAL FREQUENCY; MULTI-PULSE IRRADIATION; SEMICONDUCTING MATERIALS; SILICON WAFER SURFACE; SURFACE PLASMON POLARITONS; TI:SAPPHIRE FEMTOSECOND LASERS;

LASER EXCITATION;

EID: 79952317092     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2010.11.059     Document Type: Conference Paper

References (24)

1. J. Bonse, S. Baudach, J. Krüger, W. Kautek, and M. Lenzner Femtosecond laser ablation of silicon - modification thresholds and morphology Appl. Phys. A: Mater. Sci. Process. 74 2002 19 25 (Pubitemid 41200758)
2. G. Daminelli, J. Krüger, and W. Kautek Femtosecond laser interaction with silicon under water confinement Thin Solid Films 467 2004 334 341
3. J. Bonse, M. Munz, and H. Sturm Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses J. Appl. Phys. 97 2005 013538
4. F. Costache, S. Kouteva-Arguirova, and J. Reif Sub-damage-threshold femtosecond laser ablation from crystalline Si: surface nanostructures and phase transformation Appl. Phys. A: Mater. Sci. Process. 79 2004 1429 1432
5. T.H.R. Crawford, and H.K. Haugen Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths Appl. Surf. Sci. 253 2007 4970 4977 (Pubitemid 46329792)
6. M. Guillermin, F. Garrelie, N. Sanner, E. Audouard, and H. Soder Single- and multi-pulse formation of surface structures under static femtosecond irradiation Appl. Surf. Sci. 253 2007 8075 8079 (Pubitemid 47058706)
7. R. Wagner, and J. Gottmann Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation J. Phys.: Conf. Ser. 59 2007 333 337
8. A.Y. Vorobyev, V.S. Makin, and C. Guo Periodic ordering of random surface nanostructures induced by femtosecond laser pulses on metals J. Appl. Phys. 101 2007 034903
9. V.S. Makin, Y.I. Pestov, R.S. Makin, and A.Y. Vorobyev Plasmon-polariton surface modes and nanostructuring of semiconductors by femtosecond laser pulses J. Opt. Technol. 76 2009 555 559
10. J.E. Sipe, J.F. Young, J.S. Preston, and H.M. van Driel Laser-induced periodic surface structure. I. Theory Phys. Rev. B 27 1983 1141 1154
11. D. Dufft, A. Rosenfeld, S.K. Das, R. Grunwald, and J. Bonse Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO J. Appl. Phys. 105 2009 034908
12. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond Phys. Rev. B 79 2009 125436
13. J. Bonse, H. Sturm, D. Schmidt, and W. Kautek Chemical, morphological and accumulation phenomena in ultrashort-pulse laser ablation of TiN in air Appl. Phys. A: Mater. Sci. Process. 71 2000 657 665 (Pubitemid 32032400)
14. T.Q. Jia, H.X. Chen, M. Huang, F.L. Zhao, J.R. Qiu, R.X. Li, Z.Z. Xu, X.K. He, J. Zhang, and H. Kuroda Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses Phys. Rev. B 72 2005 125429
15. J. Bonse, A. Rosenfeld, and J. Krüger On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond laser pulses J. Appl. Phys. 106 2009 104910
16. G.A. Martsinovsky, G.D. Shandybina, D.S. Smirnov, S.V. Zabotnov, L.A. Golovan, V.Y. Timoshenko, and P.K. Kashkarov Ultrashort excitations of surface polaritons and waveguide modes in semiconductors Opt. Spectrosc. 105 2008 67 72
17. G.A. Martsinovsky, G.D. Shandybina, Y.S. Dement'eva, R.V. Dyukin, S.V. Zabotnov, L.A. Golovan, and P.K. Kashkarov Generation of surface electromagnetic waves in semiconductors under the action of femtosecond laser pulses Semiconductors 43 2009 1298 1304
18. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser ACS Nano 3 2009 4062 4070
19. K. Sokolowski-Tinten, and D. von der Linde Generation of dense electron-hole plasmas in silicon Phys. Rev. B 61 2000 2643 2650
20. E.D. Palik, Handbook of Optical Constants of Solids 1985 Academic Press Orlando, FL
21. J. Bonse, K.-W. Brzezinka, and A.J. Meixner Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy Appl. Surf. Sci. 221 2004 215 230
22. T.J. Derrien, T. Sarnet, M. Sentis, and T. Itina Application of a two-temperature model for the investigation of the periodic structure formation on Si surface in femtosecond laser interactions J. Optoelectron. Adv. Mater. 12 2010 610 615
23. G. Miyaji, and K. Miyazaki Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses Opt. Express 16 2008 16265 16271
24. J. Bonse, and J. Krüger Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon J. Appl. Phys. 108 2010 034903