Three-dimensional imaging of undercut and sidewall structures by atomic force microscopy

Review of Scientific Instruments

Volumn 82, Issue 2, 2011, Pages

  Cho, Sang Joon ^a   Ahn, Byung Woon ^a   Kim, Joonhui ^a   Lee, Jung Min ^a   Hua, Yueming ^a   Yoo, Young K ^a   Park, Sang Il ^a  

^a Park Systems Corp   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; AFM PROBE; ATOMIC FORCE MICROSCOPES; CRITICAL ANGLES; ELECTRONIC DEVICE; HIGH-RESOLUTION TECHNIQUES; NANOMETER PRECISION; SEMICONDUCTOR PROCESSING TECHNIQUES; SOFT MATERIAL; THREE DIMENSIONAL IMAGING; TRANSMISSION LINE; UNDERCUT SIDEWALLS;

ATOMIC FORCE MICROSCOPY; METAL ANALYSIS; PHOTONIC DEVICES; PHOTORESISTS; SURFACE PROPERTIES; SURFACE ROUGHNESS;

THREE DIMENSIONAL;

EID: 79952143755     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3553199     Document Type: Article

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