Fabrication of 3D metamaterial resonators using self-aligned membrane projection lithography.

Advanced materials (Deerfield Beach, Fla.)

Volumn 22, Issue 29, 2010, Pages 3171-3175

  Burckel, D Bruce ^a   Wendt, Joel R ^b   Ten Eyck, Gregory A ^b   Ellis, A Robert ^b   Brener, Igal ^b   Sinclair, Michael B ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

POLY(METHYL METHACRYLATE);

ARTICLE; CHEMISTRY; INFRARED SPECTROSCOPY; METHODOLOGY; NANOTECHNOLOGY;

NANOTECHNOLOGY; POLYMETHYL METHACRYLATE; SPECTROSCOPY, FOURIER TRANSFORM INFRARED;

EID: 79952020194     PISSN: None     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.200904153     Document Type: Article

References (0)