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Applied Optics

Volumn 50, Issue 9, 2011, Pages

Improving thin-film manufacturing yield with robust optimization

(3) Birge, Jonathan R a Kärtner, Franz X a Nohadani, Omid b

a Massachusetts Institute of Technology (United States)

b SCHOOL OF INDUSTRIAL ENGINEERING (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; INTELLIGENT SYSTEMS; MANUFACTURE; MONTE CARLO METHODS;

ANTIREFLECTION; AR COATINGS; MANUFACTURING YIELD; PROOF OF CONCEPT; ROBUST ALGORITHM; ROBUST OPTIMIZATION; ROBUST OPTIMIZATION ALGORITHM; STATISTICAL VARIATIONS;

OPTIMIZATION;

EID: 79851495309 PISSN: 1559128X EISSN: 15394522 Source Type: Journal
DOI: 10.1364/AO.50.000C36 Document Type: Article

Times cited : (14)

References (8)

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4
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5
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