Fabrication and characterization of an integrated microsystem for protein preconcentration and sensing

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 221-230

  Dextras, Philip ^a,b   Payer, Kristofor R ^a   Burg, Thomas P ^a,c   Shen, Wenjiang ^d   Wang, Ying Chih ^a,e   Han, Jongyoon ^f   Manalis, Scott R ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b UNIVERSITY OF TOKYO   (Japan)

^c MAX PLANCK INSTITUTE FOR BIOPHYSICAL CHEMISTRY   (Germany)

^d Innovative Micro Technology   (United States)

^e RheoSense Inc   (United States)

^f USA   (United States)

Author keywords

Anodic bonding; glass frit bonding; ion concentration polarization; preconcentration; semiconductor device packaging; vacuum packaging; wafer scale integration

Indexed keywords

ANODIC BONDING; GLASS FRIT; ION CONCENTRATIONS; PRE-CONCENTRATION; SEMICONDUCTOR DEVICE PACKAGING; VACUUM PACKAGING; WAFER SCALE INTEGRATION;

BODY FLUIDS; CHIP SCALE PACKAGES; CONCENTRATION (PROCESS); DETECTORS; ELECTROOSMOSIS; EQUIPMENT; FABRICATION; GLASS; GLASS BONDING; MICROSYSTEMS; NANOCANTILEVERS; PACKAGING; POLARIZATION; PROTEINS; RESONANCE; SEMICONDUCTOR SWITCHES; SILICON WAFERS; VACUUM;

WAFER BONDING;

EID: 79551613974     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2093563     Document Type: Article

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