Application of Micromachined y -cut-quartz bulk acoustic wave resonator for infrared sensing

Journal of Microelectromechanical Systems

Volumn 20, Issue 1, 2011, Pages 288-296

  Pisani, Marcelo B ^a   Ren, Kailiang ^a   Kao, Ping ^a   Tadigadapa, Srinivas ^a  

^a The Pennsylvania State University   (United States)

Author keywords

Bulk acoustic wave resonator; heterogeneous microelectromechanical systems integration; infrared (IR) detector; quartz micromachining; thermal IR sensor; Y cut quartz

Indexed keywords

BULK ACOUSTIC WAVE RESONATOR; HETEROGENEOUS MICROELECTROMECHANICAL SYSTEMS INTEGRATION; INFRARED (IR) DETECTOR; QUARTZ MICROMACHINING; THERMAL IR SENSOR; Y-CUT QUARTZ;

ACOUSTIC IMPEDANCE; ACOUSTIC NOISE; ACOUSTIC RESONATORS; ACOUSTICS; COMPOSITE MICROMECHANICS; FREQUENCY RESPONSE; INFRARED DETECTORS; INFRARED IMAGING; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL RESONATORS; OPTICAL SENSORS; RESONANCE; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

QUARTZ;

EID: 79551589840     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2100030     Document Type: Article

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