Near-field slit probe incorporating a micromachined silicon chip for millimeter-wave microscopy

Microwave and Optical Technology Letters

Volumn 53, Issue 3, 2011, Pages 660-664

  Nozokido, Tatsuo ^a   Miyasaka, Noriyuki ^a   Bae, Jongsuck ^b  

^a UNIVERSITY OF TOYAMA   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

bulk micromachining; millimeter wave imaging; near field probes; scanning near field microscopy

Indexed keywords

BULK- MICROMACHINING; IMAGE CONTRASTS; METAL-COATED; MICROMACHINED SILICON; MILLIMETER-WAVE IMAGING; NEAR FIELD PROBES; NEAR-FIELD; PROBE CONFIGURATION; SCANNING NEAR-FIELD MICROSCOPY; SI CHIPS; SLIT-TYPE PROBE; SPATIAL RESOLUTION;

COMPOSITE MICROMECHANICS; MICROMACHINING; MILLIMETER WAVE DEVICES; MILLIMETER WAVES; SCANNING; SILICON;

PROBES;

EID: 79251501334     PISSN: 08952477     EISSN: 10982760     Source Type: Journal    
DOI: 10.1002/mop.25793     Document Type: Article

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