Improvement of phase stability and accurate determination of optical constants of sno thin films by using Al2O3 capping layer

ACS Applied Materials and Interfaces

Volumn 2, Issue 6, 2010, Pages 1565-1568

  Liang, Ling Yan ^a   Liu, Zhi Min ^a   Cao, Hong Tao ^a   Shi, Yuan Yuan ^a   Sun, Xi Lian ^a   Yu, Zheng ^a   Chen, Ai Hua ^a   Zhang, Hai Zhong ^a   Fang, Yan Qun ^a  

^a NINGBO INSTITUTE OF MATERIALS TECHNOLOGY AND ENGINEERING   (China)

Author keywords

disproportionation; oxygen chemical potential; polarizability; spectroscopic ellipsometry; tin monoxide

Indexed keywords

CAPPING LAYER; CRYSTALLINITIES; DISPROPORTIONATION; DISPROPORTIONATIONS; EXTINCTION COEFFICIENTS; GAP ENERGY; IMPURITY PHASIS; POLARIZABILITIES; POLYCRYSTALLINE; REFRACTION INDEX;

CHEMICAL POTENTIAL; CHEMICALS; OPTICAL CONSTANTS; OXYGEN; PHASE STABILITY; POLARIZATION; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TIN; TITANIUM COMPOUNDS;

AMORPHOUS FILMS;

EID: 79151476295     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am100236s     Document Type: Article

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