Multispectral measurements of slightly anisotropic thin films by guided optics method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2782, Issue , 2004, Pages 674-684

  Massaneda, Josep ^a   Flory, Francois ^b   Bosch, Salvador ^a   Martorell, Jordi ^c   Monneret, Serge ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b Ecole Centrale Marseille   (France)

^c UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

effective index; Guided optics; multilayer; optical thickness; prism coupler; refractive index; rutile; thin films; total internal reflection; waveguide

Indexed keywords

EFFECTIVE INDEX; GUIDED OPTICS; OPTICAL THICKNESS; PRISM COUPLER; RUTILE; TOTAL INTERNAL REFLECTIONS;

ANISOTROPY; FILM PREPARATION; LIGHT REFRACTION; MULTILAYERS; OPTICAL MULTILAYERS; OPTICAL TESTING; ORGANIC POLYMERS; OXIDE MINERALS; PRISMS; REFRACTIVE INDEX; REFRACTOMETERS; WAVEGUIDES;

MULTILAYER FILMS;

EID: 78951479122     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.250799     Document Type: Conference Paper

References (25)

1. H. L. Liddell, Computer aided techniques for the design of multilayer filters, Hilger, London, 1981.
2. R. M. A. Azzam, N. M. Bashara, Ellipsometry and polarized light, North-Holland, Amsterdam, 1977.
3. J. P. Borgogno, B. Lazarides, E. Pelletier. "Automatic determination of the optical constants of inhomogeneous thin films", App. Opt., 21, pp. 4020-4029, 1982.
4. J. C. Manifacier, J. Gassiot, J. D. Fillard. "A simple method for the determination of the optical constants n, k and the thickness of a weakly absorbing film", J. Phys. E 9, p. 1002, 1976.
5. D. P. Arndt, R. M. A. Azzam, J. M. Bennett, J. P. Borgogno, C. K. Carniglia, W. E. Case, J. A. Dobrowolski, U. J. Gibson, T. Tuttle Hart, F. C. Ho, V. A. Hodgkin, W. P. Klapp, H. A. Macleod, E. Pelletier, M. K. Purvis, D. M. Quinn, D. H. Strome, R. Swenson, P. A. Temple, T. F. Thonn. "Multiple determination of the optical constants of thin film coating materials", App. Opt., 23, pp. 3571-3596,1984.
6. P. K. Tien, R. Ulrich, R. J. Martin. "Modes of propagating light waves in thin deposited semiconductor films", Appl. Phys. Letters, 14, pp. 291-294, 1969.
7. P. K. Tien, R. Ulrich. "Theory of prism-film coupler and thin-film light guides", J. Opt. Soc. Am., 60, pp. 1325-1337, 1970.
8. R. Ulrich. "Theory of the prism-film coupler by plane-wave analysis", J. Opt. Soc. Am., 60, pp. 1337-1350, 1970.
9. R. Ulrich, R. Torge. "Measurement of the thin film parameters with a prism coupler", App. Opt., 12, pp. 2901-2908, 1973.
10. H. Rigneault, F. Flory, "Nonlinear totally reflecting prism coupler: Thermal and third order properties of dielectric thin films", App. Opt, 34,4358-4369 (1995).
11. R. Mollenhauer. Etude de la propagation guidée dans les multicouches optiques: mesures d'atténuation et localisation despertes dans l'empilement, Ph. D. thesis, Ecole Nat. Sup. Phys. Marseille, France, 1994.
12. M. Ranier. Déflexion photothermique et propagation guidée dans les structures planaires multicouches. Etude théorique et experimentale du coefficient d'atténuation, Ph. D. thesis, Ecole Nat. Sup. Phys. Marseille, France, 1994.
13. F. Abelès. "Sur la Propagation des Ondes Electromagné tiques dans les Milieux Stratifiés", Ann. de Phys., 12th serie, 1948.
14. H. A. Macleod, Thin film optical filters (2nd ed.), Adam Hilger Ltd., Bristol, 1986.
15. D. Marcuse, Theory of Dielectric Optical Waveguides, Academic Press, New York and London, 1974.
16. P. Yeh, Optical waves in layered media, John Wiley & Sons, New York, 1988.
17. F. Flory, "Guided waves techniques for the characterization of optical coatings" in Thin films for optical systems, F. Flory ed., Optical Engineering Series (Marcel Dekker Inc. USA, 1995), 49, 393-454.
18. 2 films", App. Opt., 32, no. 28, pp. 5649-5659, 1993
19. R. Petit, M. Cadilhac. "Theorie électromagnétique du coupleur à prisme", J. Optics 8, p. 41, 1977.
20. H. K. Pulker, W. Haag, E. Moll, Balzers AG. Swiss pat. Applied 00928/85-05 (Jan. 3, 1985). USA pat no. 4, 619, 748 (1986).
21. I. H. Malitson. "Spécial IR", Electronica Acta, 6, p. 109, April 1962.
22. Handbook of optical constants of solids II, Ed. Palik, Academic Press, p. 1035, 1991.
23. Handbook of optical constants of solids II, Ed. Palik, Academic Press, p. 795, 1991.
24. W. L. Bond. "Measurement of the refractive indices of several crystals", J. App. Phys., 36, pp. 1674-1678, 1965.
25. E. Hecht. Optics (2nd ed.), Addison-Wesley, pp 163-166, 1987.