Displacement field measurement in the nanometer range

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2782, Issue , 2004, Pages 233-242

  Surrel, Yves ^a   Fournier, Nicolas ^a  

^a ECOLE DES MINES DE SAINT ETIENNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COARSE GRID; DISPLACEMENT FIELD; DISPLACEMENT MEASUREMENTS; FIELD DATA; GRID METHODS; GRID PITCH; MICRO GRID; NANO METER RANGE; PHASE-SHIFTING TECHNIQUE; RIGID BODY; SEM;

OPTICAL TESTING;

MEASUREMENTS;

EID: 78951469561     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.250749     Document Type: Conference Paper

References (8)

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7. M. Ambroise, T. Bretheau, and D. Caldemaison, Le Courrier Du CNRS 71, 121-121 (1988).
8. Y. Surrel and B. Zhao, "Simultaneous u-v displacement field measurement with a phase-shifting grid method," In Interferometry '94: Photomechanics, R. J. Pryputniewicz and J. Stupnicki, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 2342, 66-75 (1994).