Data-handling within the process chain for manufacturing of high quality optical surfaces

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 2, Issue , 2007, Pages 420-423

  Gabbia, A ^a   Autschbach, L ^a   Gunther G ^a   Roth, E ^a   Wang, H ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DATA HANDLING; MANUFACTURE; SURFACE ROUGHNESS;

CURRENT PROJECTS; FORM ACCURACY; OPTICAL SURFACES; PRECISION PARTS; PROCESS CHAIN; PRODUCTION PROCESS; STRUCTURED SURFACES; ULTRA PRECISION MANUFACTURING;

PRECISION ENGINEERING;

EID: 78651567088     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Savio, E.; Chiffre, L. De; Schmitt, R.: Metrology of freeform shaped parts. Annals of the CIRP, Keynote Paper, 2007 (to be published