Accurate characteristic impedance measurement on silicon

51st ARFTG Conference Digest-Spring: Characterization of Spread Spectrum Telecommunications Components and Systems, ARFTG 1998

Volumn , Issue , 1998, Pages 155-158

  Williams, Dylan F ^a   Arz, Uwe ^b   Grabinski, Hartmut ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDES; SILICON;

CHARACTERISTIC IMPEDANCE; CONDUCTIVE SILICON; LOSSY DIELECTRICS; PAD CAPACITANCE; PLANAR TRANSMISSION LINES;

FUSED SILICA;

EID: 78651382268     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.1998.327296     Document Type: Conference Paper

References (9)

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9. D. F. Williams and R. B. Marks, "On-Wafer Impedance Measurement on Lossy Substrates, " IEEE Microwave Guided Wave Lett., vol. 3, no. 6, pp. 175-176, June 1994.