The design of a novel MEMS temperature sensor

Gongneng Cailiao yu Qijian Xuebao/Journal of Functional Materials and Devices

Volumn 14, Issue 1, 2008, Pages 223-226

  Lu, Ting Ting ^a   Qin, Ming ^a   Huang, Qing An ^a  

^a Southeast University   (China)

Author keywords

Capacitive temperature; Sandwich cantilever; Sensor

Indexed keywords

EID: 78650932422     PISSN: 10074252     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

1. 2004. 131-132.
2. 2006. 20-21.
3. Chu W-H, Mehregany M, Mullen R L. Analysis of tip deflection and force of a bimetallic cantilever microactuator [J]. J Micromech Microeng, 1993, 3: 4-7.