Evolution of wear characteristics and frictional behavior in MEMS devices

Tribology Letters

Volumn 41, Issue 1, 2011, Pages 177-189

  Subhash, Ghatu ^c   Corwin, Alex D ^a   De Boer, Maarten P ^b  

^a GE GLOBAL RESEARCH   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c NONE

Author keywords

Friction mechanisms; MEMS devices; Wear mechanisms

Indexed keywords

CONTACT SURFACE; COUNTER SURFACE; DEVICE FAILURES; FRICTION MECHANISM; FRICTIONAL BEHAVIOR; LARGE SIZES; MATERIAL REMOVAL; MEMS DEVICES; MICROMACHINED; MICROSCOPIC OBSERVATIONS; NANOTRACTORS; OPERATIONAL LIFETIME; POLY-CRYSTALLINE SILICON; SURFACE FILMS; TRIBOLOGICAL BEHAVIORS; TWO-REGIME; WEAR CHARACTERISTICS; WEAR DEBRIS; WEAR MECHANISMS; WEAR SURFACE; WEAR TEST;

AGGLOMERATION; DEBRIS; EQUIPMENT; FRICTION; POLYSILICON; TRIBOLOGY; WEAR OF MATERIALS;

SURFACES;

EID: 78650921536     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-010-9696-z     Document Type: Article

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