A range image sensor based on 10-μm lock-in pixels in 0.18-μm CMOS imaging technology

IEEE Journal of Solid-State Circuits

Volumn 46, Issue 1, 2011, Pages 248-258

  Stoppa, David ^a   Massari, Nicola ^a   Pancheri, Lucio ^a   Malfatti, Mattia ^a   Perenzoni, Matteo ^a   Gonzo, Lorenzo ^a  

^a FONDAZIONE BRUNO KESSLER   (Italy)

Author keywords

CMOS active pixel; image sensor; photo demodulator; range finding; three dimensional image sensor; time of flight

Indexed keywords

ACTIVE PIXEL; BURIED CHANNELS; CMOS IMAGING; DEMODULATION FREQUENCY; FILL FACTOR; LINEARITY ERRORS; LOCK-IN PIXEL; MODULATION FREQUENCIES; PHOTO-DEMODULATOR; PIXEL PITCH; RANGE CAMERAS; RANGE IMAGE SENSOR; RANGE IMAGING; THREE DIMENSIONAL IMAGES; TIME OF FLIGHT;

DEMODULATION; DEMODULATORS; IMAGE SENSORS; IMAGING SYSTEMS; PIXELS; RANGE FINDERS; RANGE FINDING;

THREE DIMENSIONAL;

EID: 78650913474     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2010.2085870     Document Type: Conference Paper

References (23)

1. F. Blais, "Review of 20 years of range sensor development," J. of Elect. Imaging, vol. 13, no. 1, pp. 231-243, Jan. 2004.
2. P. Seitz, "Quantum-noise limited distance resolution of optical range imaging techniques," IEEE Trans. Circuits Syst. I, vol. 55, no. 8, pp. 2368-2377, Sep. 2008.
3. M.-C. Amann, T. B. M. Lescure, R. Myllyla, and M. Rioux, "Laser ranging: A critical review of usual techniques for distance measurement," Opt. Eng., vol. 40, pp. 10-19, Jan. 2001.
4. Y. Oike, M. Ikeda, and K. Asada, "A 375×365 high-speed 3-D rangefinding image sensor using row-parallel search architecture and multisampling technique," IEEE J. Solid-State Circuits, vol. 40, no. 2, pp. 444-453, Feb. 2005.
5. B. Hosticka, P. Seitz, and A. Simoni, "Optical time-of-flight sensors for solid-state 3D-vision," Encyclopedia of Sensors, vol. 7, pp. 259-289, 2006.
6. C. Niclass, C. Favi, T. Kluter, M. Gersbach, and E. Charbon, "A 128×128 single-photon image sensor with column-level 10-bit time-todigital converter array," IEEE J. Solid-State Circuits, vol. 43, no. 12, pp. 2977-2989, Dec. 2008.
7. O. Elkhalili, O. M. Schrey, P. Mengel, M. Petermann, W. Brockherde, and B. J. Hosticka, "A 4×64 pixel CMOS image sensor for 3-D measurements applications," IEEE J. Solid-State Circuits, vol. 39, no. 7, pp. 1208-1212, Jul. 2004.
8. G. Zach, M. Davidovic, and H. Zimmermann, "Extraneous-light resistant multipixel range sensor based on a low-power correlating pixel-circuit," in Proc. 35th IEEE European Solid-State Circuits Conf., ESSCIRC' 09, Sep. 2009, pp. 236-239.
9. D. Stoppa, L. Viarani, A. Simoni, L. Gonzo, M. Malfatti, and G. Pedretti, "A 16×16-pixel range-finding CMOS image sensor," in Proc. 30th IEEE European Solid-State Circuits Conf., ESSCIRC'04, Sep. 2004, pp. 419-422.
10. T. Spirig, P. Seitz, O. Vietze, and F. Heitger, "The lock-in CCD-Two dimensional synchronous detection of light," IEEE J. Quantum Electron., vol. 31, no. 9, pp. 1705-1708, Sep. 1995.
11. R. Miyagawa and T. Kanade, "CCD-based range-finding sensor," IEEE Trans. Electron Devices, vol. 44, no. 10, pp. 1648-1652, Oct. 1997.
12. R. Lange and P. Seitz, "Solid-state time-of-flight range camera," IEEE J. Quantum Electron., vol. 37, no. 3, pp. 390-397, Mar. 2001.
13. W. van der Tempel, R. Grootjans, D. Van Nieuwenhove, and M. Kuijk, "A 1 k-pixel 3-D CMOS sensor," in Proc. IEEE Sensors Conf., Oct. 2008, pp. 1000-1003.
14. S. Kawahito, I. A. Halin, T. Ushinaga, T. Sawada, M. Homma, and Y. Maeda, "A CMOS time-of-flight range image sensor with gates-onfield- oxide structure," IEEE Sensors J., vol. 7, no. 12, pp. 1578-1586, Dec. 2007.
15. D. V. O'Connor and D. Phillips, Time-Correlated Single-Photon Counting. London, U.K.: Academic Press, 1984.
16. Mesa Imaging website [Online]. Available: www.mesa-imaging.ch
17. PMD Technologies website [Online]. Available: www.pmdtec.com
18. Optrima NV website [Online]. Available: www.optrima.com
19. D. Stoppa, N. Massari, L. Pancheri, M. Malfatti, M. Perenzoni, and L. Gonzo, "An 80× 60 range image sensor based on 10 μm 50 MHz lock-in pixels in 0.18 μm CMOS," in IEEE Int. Solid-State Circuits Conf. (ISSCC'10) Dig., Feb. 2010, pp. 406-407.
20. R. Lange, P. Seitz, A. Biber, and R. Schwarte, "Time-of-flight range imaging with a custom solid-state image sensor," in Proc. SPIE, Laser Metrology and Inspection, Munich, Germany, 1999, vol. 3823, pp. 180-191.
21. V. Berezin, A. Krymski, and E. R. Fossum, "Lock-in pinned photodiode photodetector," US Patent 2003/0213984A1, Nov. 2003.
22. H.-J. Yoon, S. Itoh, and S. Kawahito, "A CMOS image sensor with in-pixel two-stage charge transfer for fluorescence lifetime imaging," IEEE Trans. Electron Devices, vol. 56, no. 2, pp. 214-221, Feb. 2009.
23. R. Schwarte, Z. Xu, H. Heinol, J. Olk, R. Klein, B. Buxbaum, H. Fischer, and J. Schulte, "A new electrooptical mixing and correlating sensor: Facilities and applications of the photonic mixer device (PMD)," in Proc. SPIE, 1997, vol. 3100, pp. 245-253.