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Volumn 7854, Issue , 2010, Pages
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The optical and electrical properties of W-doped VOx thin film
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Author keywords
annealing; DC magnetic co sputtering; glass substrate; IR transmittance spectrum; temperature coefficient of resistance; undoped VOx thin film; W doped VOx thin film; XRD
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Indexed keywords
COSPUTTERING;
GLASS SUBSTRATE;
IR TRANSMITTANCE SPECTRA;
TEMPERATURE COEFFICIENT OF RESISTANCE;
UNDOPED VOX THIN FILM;
W-DOPED VOX THIN FILM;
XRD;
ANNEALING;
DOPING (ADDITIVES);
ELECTRIC PROPERTIES;
GLASS;
MILLIMETER WAVE DEVICES;
MILLIMETER WAVES;
PHASE TRANSITIONS;
SPUTTER DEPOSITION;
SUBSTRATES;
TEMPERATURE;
TERAHERTZ WAVES;
THIN FILMS;
TUNGSTEN;
VANADIUM;
VANADIUM COMPOUNDS;
VAPOR DEPOSITION;
X RAY DIFFRACTION;
OPTICAL FILMS;
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EID: 78650895082
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.870292 Document Type: Conference Paper |
Times cited : (2)
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References (9)
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