-
1
-
-
67249102322
-
-
M. Vincent, L. Chiesi, J. -C. Fourrier, A. Garnier, B. Grappe, C. Lapiere, C. Coutier, A. Samperio, S. Paineau, F. Houź, and S. Nol, Proc. of the 54th IEEE Holm Conf. on Electrical Contacts, 2008, pp. 145-150.
-
(2008)
Proc. of the 54th IEEE Holm Conf. on Electrical Contacts
, pp. 145-150
-
-
Vincent, M.1
Chiesi, L.2
Fourrier, J.-C.3
Garnier, A.4
Grappe, B.5
Lapiere, C.6
Coutier, C.7
Samperio, A.8
Paineau, S.9
Houź, F.10
Nol, S.11
-
2
-
-
71449122174
-
-
10.1109/SENSOR.2009.5285825
-
C. Coutier, L. Chiesi, A. Garnier, J. -C. Fourrier, C. Lapiere, M. Trouillon, B. Grappe, M. Vincent, A. Samperio, S. Borel, C. Dieppedale, E. Lorent, and H. Sibuet, Proc. of Transducers 2009, 15th Int. Conf. Solid-State Sens., Actuators Microsys. 09, 861 (2009). 10.1109/SENSOR.2009.5285825
-
(2009)
Proc. of Transducers 2009, 15th Int. Conf. Solid-State Sens., Actuators Microsys.
, vol.9
, pp. 861
-
-
Coutier, C.1
Chiesi, L.2
Garnier, A.3
Fourrier, J.-C.4
Lapiere, C.5
Trouillon, M.6
Grappe, B.7
Vincent, M.8
Samperio, A.9
Borel, S.10
Dieppedale, C.11
Lorent, E.12
Sibuet, H.13
-
4
-
-
0035948942
-
Study of contacts in an electrostatically actuated microswitch
-
DOI 10.1016/S0924-4247(01)00627-6, PII S0924424701006276
-
S. Majumder, N. E. McGruer, G. G. Adams, P. M. Zavracky, R. H. Morrison, and J. Krim, Sens. Actuators, A 0924-4247 93, 19 (2001). 10.1016/S0924-4247(01) 00627-6 (Pubitemid 32897570)
-
(2001)
Sensors and Actuators, A: Physical
, vol.93
, Issue.1
, pp. 19-26
-
-
Majumder, S.1
McGruer, N.E.2
Adams, G.G.3
Zavracky, P.M.4
Morrison, R.H.5
Krim, J.6
-
5
-
-
78650857960
-
-
L. Almeida, K. Ishikawa, Q. Yu, R. Jackson, and R. Ramados, Proc. of SPIE, Vol. 6111, 2006.
-
(2006)
Proc. of SPIE
, vol.6111
-
-
Almeida, L.1
Ishikawa, K.2
Yu, Q.3
Jackson, R.4
Ramados, R.5
-
7
-
-
27644531339
-
Effect of nanoscale heating on electrical transport in RF MEMS switch contacts
-
DOI 10.1109/JMEMS.2005.856653
-
B. Jensen, L. L. Chow, K. Huang, K. Saitou, J. Volakis, and K. Kurabayashi, J. Micromech. Syst. 14 (5), 935 (2005). 10.1109/JMEMS.2005.856653 (Pubitemid 41555285)
-
(2005)
Journal of Microelectromechanical Systems
, vol.14
, Issue.5
, pp. 935-946
-
-
Jensen, B.D.1
Chow, L.L.-W.2
Huang, K.3
Saitou, K.4
Volakis, J.L.5
Kurabayashi, K.6
-
11
-
-
0038680506
-
-
0021-8979, 10.1063/1.1561998
-
J. Tringe, T. Uhlman, A. Oliver, and J. Houston, J. Appl. Phys. 0021-8979 93, 4661 (2003). 10.1063/1.1561998
-
(2003)
J. Appl. Phys.
, vol.93
, pp. 4661
-
-
Tringe, J.1
Uhlman, T.2
Oliver, A.3
Houston, J.4
-
12
-
-
14944365228
-
Fundamental studies of Au contacts in MEMS RF switches
-
DOI 10.1007/s11249-004-1778-3
-
S. Patton and J. Zabinski, Tribol. Lett. 1023-8883 18, 215 (2005). 10.1007/s11249-004-1778-3 (Pubitemid 40374125)
-
(2005)
Tribology Letters
, vol.18
, Issue.2
, pp. 215-230
-
-
Patton, S.T.1
Zabinski, J.S.2
-
13
-
-
34748865043
-
Surface roughness, asperity contact and gold RF MEMS switch behavior
-
DOI 10.1088/0960-1317/17/10/012, PII S0960131707498692, 012
-
O. Rezvanian, M. Zikry, C. Brown, and J. Krim, J. Micromech. Microeng. 0960-1317 17, 2006 (2007). 10.1088/0960-1317/17/10/012 (Pubitemid 47469907)
-
(2007)
Journal of Micromechanics and Microengineering
, vol.17
, Issue.10
, pp. 2006-2015
-
-
Rezvanian, O.1
Zikry, M.A.2
Brown, C.3
Krim, J.4
-
14
-
-
77956328229
-
-
0021-8979, 10.1063/1.3459893
-
D. Berman, M. J. Walker, and J. Krim, J. Appl. Phys. 0021-8979 108, 044307 (2010). 10.1063/1.3459893
-
(2010)
J. Appl. Phys.
, vol.108
, pp. 044307
-
-
Berman, D.1
Walker, M.J.2
Krim, J.3
-
15
-
-
67349128609
-
-
1057-7157, 10.1109/JMEMS.2008.2010850
-
Z. Yang, D. J. Lichtenwalner, A. S. Morris, J. Krim, and A. I. Kingon, J. Microelectromech. Syst. 1057-7157 18, 287 (2009). 10.1109/JMEMS.2008.2010850
-
(2009)
J. Microelectromech. Syst.
, vol.18
, pp. 287
-
-
Yang, Z.1
Lichtenwalner, D.J.2
Morris, A.S.3
Krim, J.4
Kingon, A.I.5
-
16
-
-
35348854382
-
Contact resistance study of noble metals and alloy films using a scanning probe microscope test station
-
DOI 10.1063/1.2785951
-
L. Chen, H. Lee, Z. Guo, N. McGruer, K. Gilbert, S. Mall, K. Leedy, and G. Adams, J. Appl. Phys. 0021-8979 102, 074910 (2007). 10.1063/1.2785951 (Pubitemid 47587903)
-
(2007)
Journal of Applied Physics
, vol.102
, Issue.7
, pp. 074910
-
-
Chen, L.1
Lee, H.2
Guo, Z.J.3
McGruer, N.E.4
Gilbert, K.W.5
Mall, S.6
Leedy, K.D.7
Adams, G.G.8
-
17
-
-
78049363155
-
-
0960-1317, 10.1088/0960-1317/20/10/105028
-
Z. Yang, D. Lichtenwalner, A. Morris, J. Krim, and A. I. Kingon, J. Micromech. Microeng. 0960-1317 20, 105028 (2010). 10.1088/0960-1317/20/10/105028
-
(2010)
J. Micromech. Microeng.
, vol.20
, pp. 105028
-
-
Yang, Z.1
Lichtenwalner, D.2
Morris, A.3
Krim, J.4
Kingon, A.I.5
|