Low-energy pulsed laser treatment of silver nanoparticles for interconnects fabrication by ink-jet method

Microelectronic Engineering

Volumn 88, Issue 3, 2011, Pages 318-321

  Lesyuk, R ^a,b   Jillek, W ^c   Bobitski, Y ^b,d   Kotlyarchuk, B ^a  

^a PIDSTRYHACH INSTITUTE FOR APPLIED PROBLEMS OF MECHANICS AND MATHEMATICS   (Ukraine)

^b LVIV POLYTECHNIC NATIONAL UNIVERSITY   (Ukraine)

^c NUREMBERG INSTITUTE OF TECHNOLOGY   (Germany)

^d UNIVERSITY OF RZESZÓW   (Poland)

Author keywords

Ink jet; Interconnects; Laser sintering; Silver nanoparticles

Indexed keywords

ADHESION TO SUBSTRATE; CERAMIC SUBSTRATES; FREE STRUCTURES; INK-JET; INK-JET METHODS; INTERCONNECTS; LASER IRRADIATIONS; LASER SINTERING; LOW ENERGIES; OPTIMAL PARAMETER; PATTERNING METHODS; POLYIMIDE SUBSTRATE; PULSED LASER ANNEALING; SILVER NANOPARTICLES; SILVER PARTICLES;

CERAMIC MATERIALS; ELECTRIC RESISTANCE; FABRICATION; INK; INK JET PRINTING; IRRADIATION; LASER HEATING; NANOPARTICLES; OPTIMIZATION; POLYIMIDES; SILVER; SINTERING; SUBSTRATES;

PULSED LASERS;

EID: 78650749489     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.11.037     Document Type: Article

References (14)

1. S.B. Fuller, E.J. Wilhelm, and J.M. Jacobson Journal of Microelectromechanical Systems 11 1 2002
2. Y.-H. Yoon Microelectronic Engineering 87 11 2010 2230 2233
3. O. Swenson, V. Marinov, Laser sintering of direct-write nanosized materials, in: Advances in Laser Materials Processing Technology, J. Lawrence, D.K.Y. Low, J. Pou, E. Toyserkani (Eds.), Woodhead Publishing/CRC, Cambridge, UK, 2010, p. 512.
4. N.R. Bieri Applied Physics Letters 82 20 2003 3529 3531
5. J. Chung Applied Physics Letters 84 5 2004 801 803
6. S.H. Ko Nanotechnology 18 2007
7. A. Khan, N. Rasmussen, O.F. Swenson, and V. Marinov Proceedings of the SPIE 6879 2008
8. A. Khan, N. Rasmussen, V. Marinov, and O.F. Swenson Journal of Microelectronics and Electronic Packaging 5 2 (2nd Qtr) 2008 77 86
9. R. Das, S.S. Nath, D. Chakdar, and R. Bhattacharjee Journal of Nanotechnology Online 5 2009
10. M. Zheng, M. Gu, Y. Jin, and G. Jin Materials Research Bulletin 36 2001 853 859
11. J.J. Mock Journal of Chemical Physics 116 15 2002 6755 6759
12. S. Ko Sensors and Actuators A 134 2007 161 168
13. D. Li, D. Sutton, A. Burgess, D. Graham, and P.D. Calvert Journal of Materials Chemistry 19 2009 3719 3724
14. B.K. Park, D. Kim, S. Jeong, J. Moon, and J.S. Kim Thin Solid Films 515 2007 7706 7711