SCOPUS 정보 검색 플랫폼

Volumn 97, Issue 25, 2010, Pages

Reactive solid-state dewetting of Cu-Ni films on silicon

(9) Clearfield, Raphael a Railsback, Justin G a Pearce, Ryan C a,b Hensley, Dale K c Fowlkes, Jason D c Fuentes Cabrera, Miguel c Simpson, Michael L b,c Rack, Philip D b,c Melechko, Anatoli V a

a North Carolina State University (United States)

b University of Tennessee (United States)

c OAK RIDGE NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CU-NI ALLOYS; DE-WETTING; DISTRIBUTION STATISTICS; MASS TRANSPORT; NI FILMS; REDUCING ATMOSPHERE; SELECTIVE WET ETCHING; SILICON SUBSTRATES; STRONG COUPLING;

COPPER ALLOYS; POTASSIUM; POTASSIUM HYDROXIDE; SCANNING ELECTRON MICROSCOPY; SILICIDES; SILICON ALLOYS; WET ETCHING;

COPPER;

EID: 78650719476 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3527078 Document Type: Article

Times cited : (14)

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