Piezoelectric microelectromechanical systems - Challenges and opportunities

Procedia Engineering

Volumn 5, Issue , 2010, Pages 468-471

  Tadigadapa, Srinivas ^a,b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Aluminum nitride; Chemical sensors; Deposition; Etching; Lead zirconate titanante; Microactuators; Microfabrication; Microsensors; Physical sensors; Piezoelectric MEMS; PZT; Quartz

Indexed keywords

ALUMINUM COATINGS; ALUMINUM NITRIDE; CHEMICAL ANALYSIS; CHEMICAL SENSORS; CRYSTAL OSCILLATORS; DEPOSITION; ELECTROMECHANICAL DEVICES; ETCHING; MEMS; MICROACTUATORS; MICROFABRICATION; MICROSENSORS; MINIATURE INSTRUMENTS; PIEZOELECTRIC MATERIALS; QUARTZ; SILICON COMPOUNDS; TRANSDUCERS; WIRELESS TELECOMMUNICATION SYSTEMS;

CHEMICAL ANALYSIS SYSTEMS; FABRICATION TECHNOLOGIES; HIGH ENERGY DENSITY MATERIALS; LEAD ZIRCONATE; PHYSICAL SENSORS; PIEZOELECTRIC MEMS; RESEARCH TECHNOLOGIES; WIRELESS APPLICATION;

PIEZOELECTRICITY;

EID: 78650607887     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.148     Document Type: Conference Paper

References (9)

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