An UV linear variable optical filter-based micro-spectrometer

Procedia Engineering

Volumn 5, Issue , 2010, Pages 416-419

  Emadi, Arvin ^a   Wu, H ^a   De Graaf, G ^a   Hedsten, K ^b   Enoksson, P ^b   Correia, J H ^c   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c UNIVERSITY OF MINHO   (Portugal)

Author keywords

Linear variable filter; Micro spectrometer; On chip; Ultra Violet; UV

Indexed keywords

BANDPASS FILTERS; OPTICAL FILTERS; SIGNAL PROCESSING;

COMPATIBLE PROCESS; LINEAR VARIABLE FILTER; MICRO-SPECTROMETER; MONOCHROMATIC LIGHT; ON CHIPS; SPECTRAL MEASUREMENT; ULTRA VIOLET; WAVELENGTH RANGES;

SPECTROMETERS;

EID: 78650606057     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.135     Document Type: Conference Paper

References (6)

1. J. H. Correia, A. Emadi and R. F. Wolffenbuttel, UV Bandpass optical filter for microspectrometers, ECS transactions, Vol. 4, No1, pp.141-147, Electro Chemical Society, NJ, USA September 2006
2. A. Emadi, H. Wu, S. Grabarnik, G. De Graaf, R.F. Wolffenbuttel,IC- compatible fabrication of linear variable optical filters for microspectrometer, Procedia Chemistry, Volume 1, Issue 1, Proceedings of the Eurosensors XXIII conference, September 2009, Pages 1143-1146
3. A. Emadi, H. Wu, S. Grabarnik, G. De Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolffenbuttel, Fabrication and characterization of IC-Compatible Linear Variable Optical Filters with application in a micro-spectrometer, Sensors and Actuators A: Physical, In Press, Corrected Proof, Available online 7 May 2010,
4. A. Emadi, H. Wu, S. Grabarnik, G. de Graaf and R.F. Wolffenbuttel, Vertically tapered layers for optical applications fabricated using resist reflow, J. Micromech. Microeng. 19 (2009) 074014
5. K. Mohamed, M.M. Alkaisi, Three-dimensional pattern transfer on quartz substrates, Microelectronic Engineering, Volume 87, Issues 5-8, The 35th International Conference on Micro- and Nano-Engineering (MNE), May-August 2010, Pages 1463-1466
6. Arvin Emadi, Semen Grabarnik, Huaiwen Wu, Ger de Graaf, Karin Hedsten, Peter Enoksson, Jose Higino Correia, and Reinoud F. Wolffenbuttel, Spectral measurement using IC-compatible linear variable optical filter, Proc. SPIE 7716, 77162G (2010)