Smart temperature sensors in standard CMOS

Procedia Engineering

Volumn 5, Issue , 2010, Pages 930-939

  Makinwa, K A A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Figure of merit; Smart temperature sensor; Survey; Temperature sensor

Indexed keywords

ANALOG TO DIGITAL CONVERSION; CMOS INTEGRATED CIRCUITS; SURVEYING; SURVEYS;

ANALOG TO DIGITAL CONVERTERS; CMOS TECHNOLOGY; FIGURE OF MERITS; FIGURES OF MERITS; INTEGRATED SYSTEMS; OPERATING PRINCIPLES; SMART TEMPERATURE SENSORS; STATE OF THE ART;

TEMPERATURE SENSORS;

EID: 78650604889     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.262     Document Type: Conference Paper

References (46)

1. A. Bakker, "CMOS smart temperature sensors - an overview," Proc. IEEE Sensors, vol. 2, pp. 1423-1427, Oct. 2002.
2. P. Krummenacher and H. Oguey, "Smart temperature sensor in CMOS technology," Sensors and Actuators A, vol. 22, is. 1 - 3, pp. 636-638, Mar. 1990.
3. R.A. Bianchi et al., "CMOS-compatible temperature sensor with digital output for wide temperature range applications," Microelectronics J., vol. 31, pp. 803-810, Oct. 2000.
4. G. Wang and G.C.M. Meijer, "The temperature characteristics of bipolar transistors fabricated in CMOS technology," Sensors and Actuators A, vol 87, pp. 81-89, Dec. 2000.
5. G. C. M. Meijer, G. Wang, and F. Fruett, "Temperature sensors and voltage references implemented in CMOS technology," IEEE Sensors J., vol. 1, no. 3, pp. 225-234, Oct. 2001.
6. J. Creemer et al., "The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance," IEEE Sensors J., vol. 1, no. 2, pp. 98-108, Aug. 2001.
7. I. Nam and K. Lee, "High-performance RF mixer and operational amplifier BICMOS circuits using parasitic vertical bipolar transistor in CMOS technology," J. Solid-State Circuits, vol. 40, no. 2, pp. 392-402, Feb. 2005.
8. M.A.P. Pertijs, K.A.A. Makinwa, andJ.H. Huijsing, "A CMOS temperature sensor with a 3σ inaccuracy of ±0.1°C from -55°C to 125°C," J. Solid-State Circuits, vol. 40, no. 12, pp. 2805-2815, Dec. 2005.
9. D. Ruffieux et al, "Silicon resonator based 3.2 μW real time clock with ± 10 ppm frequency accuracy," J. Solid-State Circuits, vol. 45, no. 1, pp. 224-234, Jan. 2010.
10. C.-K. Kim et al., "CMOS temperature sensor with ring oscillator for mobile DRAM self-refresh control," Microelectronics J., vol. 38, no. 10 - 11, pp. 1042-1049, Oct. 2007.
11. A. Vaz et al., "Full Passive UHF Tag With a Temperature Sensor Suitable for Human Body Temperature Monitoring," TCAS II, vol. 57, no. 2, Feb, 2010.
12. V. Szekely, "Thermal monitoring of microelectronic structures," Microelectronics J., vol. 25, no. 3, pp. 157-170, May 1994.
13. K.A.A. Makinwa and M.F. Snoeij, "A CMOS temperature-to-frequency converter with an inaccuracy of ±0.5°C (3σ) from -40 to 105°C," J. Solid-State Circuits, vol. 41, no. 12, pp. 2992-2997, Dec. 2006.
14. C.P.L. van Vroonhoven, M. Kashmiri and K.A.A. Makinwa, "CMOS temperature sensors based on thermal diffusion," Proc. Therminic, pp. 140-143, Oct. 2009.
15. C.P.L. van Vroonhoven and K.A.A. Makinwa, "A thermal-diffusivity- based temperature sensor with an untrimmed inaccuracy of ±0.2°C (3σ) from -55 to 125°C," Digest ISSCC, pp. 314-315, Feb. 2010.
16. A.L. Aita et al., "A CMOS Smart Temperature Sensor with a Batch-Calibrated Inaccuracy of ±0.25°C (3σ) from -70 to 130°C," Digest ISSCC, pp. 342-343, Feb. 2009.
17. K.A.A. Makinwa et al., "Smart sensor design: the art of compensation and cancellation," Proc. ESSCIRC, pp. 76-82, Sept 2007.
18. M.A.P. Pertijs and J.H. Huijsing, Precision temperature sensors in CMOS technology. Dordrecht, The Netherlands: Springer, 2006.
19. M. Tuthill, "A switched-current, switched-capacitor temperature sensor in 0.6μm CMOS," JSSC, vol. 33, no. 7, pp. 1117-1122, July 1998.
20. F. Sebastiano et al., "A 1.2V 10μW NPN-Based Temperature Sensor in 65nm CMOS with an inaccuracy of ±0.2°C from -70°C to 125°C," Digest ISSCC, pp. 312-313, Feb. 2010.
21. M.A.P. Pertijs, A. Bakker, and J.H. Huijsing, "A high-accuracy temperature sensor with second-order curvature correction and digital bus interface," Proc. ISCAS, pp. 368-371, May 2001.
22. Y.W. Li et al., "A 1.05V 1.6mW, 0.45°C 3σ Resolution ΣΔ based Temperature Sensor with Parasitic Resistance Compensation in 32nm Digital CMOS Process, J. Solid-State Circuits, vol. 44, no. 12, Dec. 2009.
23. "ADT7320 data sheet," Analog Devices Inc., Aug. 2004, www.analog.com.
24. M.A.P. Pertijs et al., "Low-Cost Calibration Techniques for Smart Temperature Sensors," IEEE Sensors J., vol. 10, is. 6, pp. 1098-1105, June 2010.
25. K. Ueno et al., "Ultralow-Power Smart Temperature Sensor with Subthreshold CMOS Circuits," Proc. Int. Symp. Intelligent Signal Processing and Communications (ISPACS), pp. 546-549, Dec. 2006.
26. K. Ueno, T. Asai, and Y. Amemiya, "Temperature-to-frequency converter consisting of subthreshold mosfet circuits for smart temperature-sensor LSIs," Proc. Transducers, pp. 2433-2436, June 2009.
27. E. Saneyoshi et al., "A 1.1V 35 μm x 35 μm thermal sensor with supply voltage sensitivity of 2°C/10% -supply for thermal management on the SX-9 supercomputer," Digest VLSI Circuits, pp. 152-153, June 2008.
28. M.K. Law, A. Bermak and H.C. Luong, "A sub-μW embedded CMOS temperature sensor for RFID food monitoring application, J. Solid- State Circuits, vol. 40, no. 8, pp. 1246-1255, June 2010.
29. P. Chen et al., "A time-to-digital-converter based CMOS smart temperature sensor," J. Solid-State Circuits, vol. 40, no. 8, pp. 1642-1648, Aug. 2005.
30. ∼ +0.6°C over a 0°C to 90°C range," J. Solid-State Circuits, vol. 45, no. 3, pp. 600-609, Mar. 2010.
31. K. Woo et al., "Dual-DLL-based CMOS all-digital temperature sensor for microprocessor thermal monitoring," Digest ISSCC, pp. 68-69, Feb. 2009.
32. T. Veijola, "Simple model for thermal spreading impedance," Proc. BEC, pp. 73-76, Oct. 1996.
33. Y. S. Touloukian et al., Thermophysical Properties of Matter: Vol. 10. New York: Plenum, 1998.
34. S.M. Kashmiri and K.A.A. Makinwa, "Measuring the Thermal Diffusivity of CMOS Chips," IEEE Sensors, pp. 45-48, Oct. 2009.
35. C.P.L. van Vroonhoven and K.A.A. Makinwa, "A thermal-diffusivity- based temperature sensor with an untrimmed inaccuracy of ±0.5°C (3σ) from -40 to 105°C," Digest ISSCC, pp. 576-577, Feb. 2008.
36. M. Kashmiri, S. Xia and K.A.A. Makinwa, "A Temperature-to-Digital Converter Based on an Optimized Electrothermal Filter," J. Solid- State Circuits, vol. 44, is. 7, pp. 2026-2035, July 2009.
37. C.P.L. van Vroonhoven and K.A.A. Makinwa, "Thermal Diffusivity Sensors for Wide-Range Temperature Sensing," Proc. IEEE Sensors, pp. 764-767, Oct. 2008.
38. B. Murmann, "A/D Converter Trends: Power Dissipation, Scaling and Digitally Assisted Architectures," Proc. CICC, pp. 105-112, Sept. 2008.
39. K.A.A. Makinwa, "Smart Temperature Sensor Survey", [Online]. Available: http://ei.ewi.tudelft.nl/docs/TSensor-survey.xls
40. K. Opasjumruskit et al., "Self-powered wireless temperature sensors exploit RFID technology," IEEE Pervasive Computing, vol. 5, no. 1, pp. 54-61, Jan.-Mar. 2006.
41. J. Yin et al., "A System-on-Chip EPC Gen-2 Passive UHF RFID Tag with Embedded Temperature Sensor," Digest ISSCC, pp. 308-309, Feb. 2010,
42. K. Souri, M. Kashmiri and K.A.A. Makinwa, "A CMOS Temperature Sensor with an Energy-Efficient Zoom ADC and an Inaccuracy of ±0.25°C (3σ) from -40 to 125°C," Digest ISSCC, pp. 310-311, Feb. 2010.
43. Y.S. Lin, D. Sylvester and D. Blaauw, "An ultra low power 1V, 220nW temperature sensor for passive wireless applications," Proc. CICC, pp. 507-510, Sept. 2008.
44. M.K. Law and A. Bermak, "A 405-nW CMOS Temperature Sensor based on Linear MOS Operation," TCAS II, vol. 56, no. 12, Dec. 2009.
45. M. Lutz et al., "MEMS Oscillators for High Volume Commercial Applications," Digest Transducers, pp. 49-52, June 2007.
46. A.J.M. Boomkamp and G.C.M. Meijer, "An accurate biomedical temperature transducer with on-chip microcomputer interfacing," Proc. ESSCIRC, pp. 420-423, Sept. 1985.