Gate pulsed readout of floating gate fet gas sensors

Procedia Engineering

Volumn 5, Issue , 2010, Pages 13-16

  Pohle, R ^a   Von Sicard, O ^a   Fleischer, M ^a   Frerichs, H P ^b   Wilbertz, Ch ^b   Freund, I ^b  

^a SIEMENS AG   (Germany)

^b Micronas GmbH Freiburg   (Germany)

Author keywords

FGFET; Floating gate FET; Gas sensor; Humidity; Volume effects; Work function

Indexed keywords

ATMOSPHERIC HUMIDITY; GAS DETECTORS; WORK FUNCTION;

BASELINE STABILITY; FGFET; FLOATING GATES; LONG TERM STABILITY; SENSING MATERIAL; SURFACE CONDUCTIVITY; SUSPENDED GATES; VOLUME EFFECT;

CHEMICAL SENSORS;

EID: 78650602516     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.036     Document Type: Conference Paper

References (4)

1. M. Fleischer, Advances in application potential of adsorptive-type solid state gas sensors. 2008 Meas. Sci. Technol. 19 042001
2. R. Pohle et al., Realization of a new sensor concept: improved CCFET and SGFET type gas sensors in hybrid flip-chip technology, Proceedings of the 12th International Conference on Solid-State Sensors, Boston, MA, USA, June 8-12, 2003.
3. Ch. Wilbertz, H.-P. Frerichs, I. Freund, M. Lehmann, Suspended-Gate- and Lundstrom-FET integrated on a CMOS-chip, Sens. Actuators A 123-124 (2005) 2-6
4. R. Moos, Kathy Sahner, Maximilian Fleischer, Ulrich Guth, Nicolae Barsan, Udo Weimar, Solid State Gas Sensor Research in Germany - a Status Report, Sensors 2009, 9(6), 4323-4365.