A tri-axial accelerometer with structure-based voltage operation by using series-connected piezoelectric elements

Procedia Engineering

Volumn 5, Issue , 2010, Pages 894-897

  Kanda, Kensuke ^a   Iga, Yuki ^a   Matsuoka, Junya ^b   Jiang, Yonggang ^a   Fujita, Takayuki ^a   Higuchi, Kohei ^a   Maenaka, Kazusuke ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b YAMAHA CORPORATION   (Japan)

Author keywords

Accelerometer; Piezoelectric materials; Series conection; Structure design; Voltage operation

Indexed keywords

ACCELEROMETERS; DEFORMATION; ELECTRODES; FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY;

CROSS-AXIS SENSITIVITY; FINITE ELEMENT METHOD SIMULATION; PIEZOELECTRIC ELEMENTS; PIEZOELECTRIC THIN FILMS; SERIES CONECTION; STRUCTURE DESIGN; TRIAXIAL ACCELEROMETER; VOLTAGE OPERATIONS;

THIN FILMS;

EID: 78650598620     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.253     Document Type: Conference Paper

References (3)

1. Kanda K. Iga Y. Matsuoka J. Fujita T. Higuchi K. Maenaka K. Multiplication of sensor output voltage using series-connected piezoelectric elements. IEEJ Transactions on Sensors and Micromachines 2010;130:124-129.
2. Kanda K. Iga Y. Hashimoto T. Fujita T. Higuchi K. Maenaka K. Microfabrication and application of series-connected PZT elements. Procedia Chemistry (Proc. Eurosensors XXIII) 2009;1:808-810.
3. Kunz K. Enoksson P. Stemme G. Highly sensitive triaxial silicon accelerometer with integrated PZT thin film detectors. Sensors and Actuators A 2001;92:156-160.